Practical XHV electron gun

Tomohiro Urata, Tsuyoshi Ishikawa, C. H O Boklac, Chuhei Oshima

Research output: Contribution to journalArticle

Abstract

We have developed practical XHV chambers of a electron gun, of which the operating pressures are 1 × 10-9 Pa in a stainless-steel one and 4 × 10-9 Pa in a permalloy one. By mounting a noble single-atom electron source with high brightness and high spatial coherence on the electron gun including electron optics, we demonstrated highly collimated electron-beam emission: ∼80% of the total emission current entered the electron optics. This ratio was two or three orders of magnitude higher than those of the conventional electron sources. In XHV, in addition, we confirmed stable electron emission up to 20 nA, which results in the specimen current high enough for scanning electron microscopes.

Original languageEnglish
Pages (from-to)642-646
Number of pages5
JournalJournal of the Vacuum Society of Japan
Volume51
Issue number10
Publication statusPublished - 2008

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ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Surfaces, Coatings and Films

Cite this

Urata, T., Ishikawa, T., Boklac, C. H. O., & Oshima, C. (2008). Practical XHV electron gun. Journal of the Vacuum Society of Japan, 51(10), 642-646.