Practical XHV electron gun

Tomohiro Urata, Tsuyoshi Ishikawa, C. H O Boklac, Chuhei Oshima

Research output: Contribution to journalArticle

Abstract

We have developed practical XHV chambers of a electron gun, of which the operating pressures are 1 × 10-9 Pa in a stainless-steel one and 4 × 10-9 Pa in a permalloy one. By mounting a noble single-atom electron source with high brightness and high spatial coherence on the electron gun including electron optics, we demonstrated highly collimated electron-beam emission: ∼80% of the total emission current entered the electron optics. This ratio was two or three orders of magnitude higher than those of the conventional electron sources. In XHV, in addition, we confirmed stable electron emission up to 20 nA, which results in the specimen current high enough for scanning electron microscopes.

Original languageEnglish
Pages (from-to)642-646
Number of pages5
JournalJournal of the Vacuum Society of Japan
Volume51
Issue number10
Publication statusPublished - 2008

Fingerprint

Electron optics
electron optics
Electron sources
Electron guns
electron sources
electron guns
Electron emission
Stainless Steel
Permalloys (trademark)
mounting
Mountings
electron emission
high current
stainless steels
Luminance
Electron beams
brightness
Electron microscopes
Stainless steel
electron microscopes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Surfaces, Coatings and Films

Cite this

Urata, T., Ishikawa, T., Boklac, C. H. O., & Oshima, C. (2008). Practical XHV electron gun. Journal of the Vacuum Society of Japan, 51(10), 642-646.

Practical XHV electron gun. / Urata, Tomohiro; Ishikawa, Tsuyoshi; Boklac, C. H O; Oshima, Chuhei.

In: Journal of the Vacuum Society of Japan, Vol. 51, No. 10, 2008, p. 642-646.

Research output: Contribution to journalArticle

Urata, T, Ishikawa, T, Boklac, CHO & Oshima, C 2008, 'Practical XHV electron gun', Journal of the Vacuum Society of Japan, vol. 51, no. 10, pp. 642-646.
Urata T, Ishikawa T, Boklac CHO, Oshima C. Practical XHV electron gun. Journal of the Vacuum Society of Japan. 2008;51(10):642-646.
Urata, Tomohiro ; Ishikawa, Tsuyoshi ; Boklac, C. H O ; Oshima, Chuhei. / Practical XHV electron gun. In: Journal of the Vacuum Society of Japan. 2008 ; Vol. 51, No. 10. pp. 642-646.
@article{855532be902e4ca0a3b6a57712d82dcf,
title = "Practical XHV electron gun",
abstract = "We have developed practical XHV chambers of a electron gun, of which the operating pressures are 1 × 10-9 Pa in a stainless-steel one and 4 × 10-9 Pa in a permalloy one. By mounting a noble single-atom electron source with high brightness and high spatial coherence on the electron gun including electron optics, we demonstrated highly collimated electron-beam emission: ∼80{\%} of the total emission current entered the electron optics. This ratio was two or three orders of magnitude higher than those of the conventional electron sources. In XHV, in addition, we confirmed stable electron emission up to 20 nA, which results in the specimen current high enough for scanning electron microscopes.",
author = "Tomohiro Urata and Tsuyoshi Ishikawa and Boklac, {C. H O} and Chuhei Oshima",
year = "2008",
language = "English",
volume = "51",
pages = "642--646",
journal = "Journal of the Vacuum Society of Japan",
issn = "1882-2398",
publisher = "Vacuum Society of Japan",
number = "10",

}

TY - JOUR

T1 - Practical XHV electron gun

AU - Urata, Tomohiro

AU - Ishikawa, Tsuyoshi

AU - Boklac, C. H O

AU - Oshima, Chuhei

PY - 2008

Y1 - 2008

N2 - We have developed practical XHV chambers of a electron gun, of which the operating pressures are 1 × 10-9 Pa in a stainless-steel one and 4 × 10-9 Pa in a permalloy one. By mounting a noble single-atom electron source with high brightness and high spatial coherence on the electron gun including electron optics, we demonstrated highly collimated electron-beam emission: ∼80% of the total emission current entered the electron optics. This ratio was two or three orders of magnitude higher than those of the conventional electron sources. In XHV, in addition, we confirmed stable electron emission up to 20 nA, which results in the specimen current high enough for scanning electron microscopes.

AB - We have developed practical XHV chambers of a electron gun, of which the operating pressures are 1 × 10-9 Pa in a stainless-steel one and 4 × 10-9 Pa in a permalloy one. By mounting a noble single-atom electron source with high brightness and high spatial coherence on the electron gun including electron optics, we demonstrated highly collimated electron-beam emission: ∼80% of the total emission current entered the electron optics. This ratio was two or three orders of magnitude higher than those of the conventional electron sources. In XHV, in addition, we confirmed stable electron emission up to 20 nA, which results in the specimen current high enough for scanning electron microscopes.

UR - http://www.scopus.com/inward/record.url?scp=58549087551&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=58549087551&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:58549087551

VL - 51

SP - 642

EP - 646

JO - Journal of the Vacuum Society of Japan

JF - Journal of the Vacuum Society of Japan

SN - 1882-2398

IS - 10

ER -