Abstract
This paper presents the setup, operation principle, and fabrication process of a novel type of flow velocity sensor. Like the well known classical Prandtl tube, it realizes flow velocity detection by measurement of the pressure difference between stagnant fluid pressure in front of the sensor and static pressure in the flow around the sensor. This difference results in a deflection of a silicon diaphragm suspended boss, that serves as the counter electrode of an integrated capacitor which is directly exposed to the fluid to be measured. The main parameters influencing the sensor operation are discussed. Results of wind tunnel experiments confirm the sensor's operation principle. Finally, the sensor's merits and drawbacks are summarized.
| Original language | English |
|---|---|
| Title of host publication | International Conference on Solid-State Sensors and Actuators, Proceedings |
| Place of Publication | Piscataway, NJ, United States |
| Publisher | IEEE |
| Pages | 155-158 |
| Number of pages | 4 |
| Volume | 1 |
| Publication status | Published - 1997 |
| Externally published | Yes |
| Event | Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) - Chicago, IL, USA Duration: 1997 Jun 16 → 1997 Jun 19 |
Other
| Other | Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) |
|---|---|
| City | Chicago, IL, USA |
| Period | 97/6/16 → 97/6/19 |
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ASJC Scopus subject areas
- Engineering(all)
Cite this
Prandtl micro flow sensor (PMFS) : A novel silicon diaphragm capacitive sensor for flow velocity measurement. / Berberig, Oliver; Nottmeyer, Kay; Mizuno, Jun; Kanai, Yoshitaka; Kobayashi, Takashi.
International Conference on Solid-State Sensors and Actuators, Proceedings. Vol. 1 Piscataway, NJ, United States : IEEE, 1997. p. 155-158.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Prandtl micro flow sensor (PMFS)
T2 - A novel silicon diaphragm capacitive sensor for flow velocity measurement
AU - Berberig, Oliver
AU - Nottmeyer, Kay
AU - Mizuno, Jun
AU - Kanai, Yoshitaka
AU - Kobayashi, Takashi
PY - 1997
Y1 - 1997
N2 - This paper presents the setup, operation principle, and fabrication process of a novel type of flow velocity sensor. Like the well known classical Prandtl tube, it realizes flow velocity detection by measurement of the pressure difference between stagnant fluid pressure in front of the sensor and static pressure in the flow around the sensor. This difference results in a deflection of a silicon diaphragm suspended boss, that serves as the counter electrode of an integrated capacitor which is directly exposed to the fluid to be measured. The main parameters influencing the sensor operation are discussed. Results of wind tunnel experiments confirm the sensor's operation principle. Finally, the sensor's merits and drawbacks are summarized.
AB - This paper presents the setup, operation principle, and fabrication process of a novel type of flow velocity sensor. Like the well known classical Prandtl tube, it realizes flow velocity detection by measurement of the pressure difference between stagnant fluid pressure in front of the sensor and static pressure in the flow around the sensor. This difference results in a deflection of a silicon diaphragm suspended boss, that serves as the counter electrode of an integrated capacitor which is directly exposed to the fluid to be measured. The main parameters influencing the sensor operation are discussed. Results of wind tunnel experiments confirm the sensor's operation principle. Finally, the sensor's merits and drawbacks are summarized.
UR - http://www.scopus.com/inward/record.url?scp=0030651456&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0030651456&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:0030651456
VL - 1
SP - 155
EP - 158
BT - International Conference on Solid-State Sensors and Actuators, Proceedings
PB - IEEE
CY - Piscataway, NJ, United States
ER -