Prandtl micro flow sensor (PMFS): A novel silicon diaphragm capacitive sensor for flow velocity measurement

Oliver Berberig, Kay Nottmeyer, Jun Mizuno, Yoshitaka Kanai, Takashi Kobayashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

This paper presents the setup, operation principle, and fabrication process of a novel type of flow velocity sensor. Like the well known classical Prandtl tube, it realizes flow velocity detection by measurement of the pressure difference between stagnant fluid pressure in front of the sensor and static pressure in the flow around the sensor. This difference results in a deflection of a silicon diaphragm suspended boss, that serves as the counter electrode of an integrated capacitor which is directly exposed to the fluid to be measured. The main parameters influencing the sensor operation are discussed. Results of wind tunnel experiments confirm the sensor's operation principle. Finally, the sensor's merits and drawbacks are summarized.

Original languageEnglish
Title of host publicationInternational Conference on Solid-State Sensors and Actuators, Proceedings
Place of PublicationPiscataway, NJ, United States
PublisherIEEE
Pages155-158
Number of pages4
Volume1
Publication statusPublished - 1997
Externally publishedYes
EventProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) - Chicago, IL, USA
Duration: 1997 Jun 161997 Jun 19

Other

OtherProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)
CityChicago, IL, USA
Period97/6/1697/6/19

Fingerprint

Capacitive sensors
Flow measurement
Diaphragms
Flow velocity
Velocity measurement
Silicon
Sensors
Fluids
Wind tunnels
Capacitors
Fabrication
Electrodes

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Berberig, O., Nottmeyer, K., Mizuno, J., Kanai, Y., & Kobayashi, T. (1997). Prandtl micro flow sensor (PMFS): A novel silicon diaphragm capacitive sensor for flow velocity measurement. In International Conference on Solid-State Sensors and Actuators, Proceedings (Vol. 1, pp. 155-158). Piscataway, NJ, United States: IEEE.

Prandtl micro flow sensor (PMFS) : A novel silicon diaphragm capacitive sensor for flow velocity measurement. / Berberig, Oliver; Nottmeyer, Kay; Mizuno, Jun; Kanai, Yoshitaka; Kobayashi, Takashi.

International Conference on Solid-State Sensors and Actuators, Proceedings. Vol. 1 Piscataway, NJ, United States : IEEE, 1997. p. 155-158.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Berberig, O, Nottmeyer, K, Mizuno, J, Kanai, Y & Kobayashi, T 1997, Prandtl micro flow sensor (PMFS): A novel silicon diaphragm capacitive sensor for flow velocity measurement. in International Conference on Solid-State Sensors and Actuators, Proceedings. vol. 1, IEEE, Piscataway, NJ, United States, pp. 155-158, Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), Chicago, IL, USA, 97/6/16.
Berberig O, Nottmeyer K, Mizuno J, Kanai Y, Kobayashi T. Prandtl micro flow sensor (PMFS): A novel silicon diaphragm capacitive sensor for flow velocity measurement. In International Conference on Solid-State Sensors and Actuators, Proceedings. Vol. 1. Piscataway, NJ, United States: IEEE. 1997. p. 155-158
Berberig, Oliver ; Nottmeyer, Kay ; Mizuno, Jun ; Kanai, Yoshitaka ; Kobayashi, Takashi. / Prandtl micro flow sensor (PMFS) : A novel silicon diaphragm capacitive sensor for flow velocity measurement. International Conference on Solid-State Sensors and Actuators, Proceedings. Vol. 1 Piscataway, NJ, United States : IEEE, 1997. pp. 155-158
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