Preferential immobilization of biomolecules on silicon microstructure array by means of electron beam lithography on organosilane self-assembled monolayer resist

Takashi Tanii, Takumi Hosaka, Takeo Miyake, Guo Jun Zhang, Tamotsu Zako, Takashi Funatsu, Iwao Ohdomari

Research output: Contribution to journalArticle

25 Citations (Scopus)

Abstract

A novel fabrication process of silicon microstructure array for preferential immobilization of biomolecules is proposed. We perform electron beam lithography on a self-assembled monolayer (SAM), and achieve high-density silicon patterns terminated with both 3-aminopropyltriethoxysilane (APTES) and octadecyltrimethoxysilane (ODS). The amino-terminated surface produces the site-directed covalent immobilization of DNA inside the pattern, while the hydrophobic surface of the ODS-SAM prevents the adsorption. As a result, we have succeeded in immobilizing the DNA within the amino-modified area. By using this methodology, we demonstrate the miniaturization of deoxyribonucleic acid (DNA) chip. After the covalent attachment of the amino-modified oligonucleotides to the microstructures, we hybridize the immobilized DNA with the target DNA labeled with a fluorescent dye. The signals from the DNA chip exhibit the specific binding due to the DNA-DNA interaction. These results show the feasibility of this technique for high-density information storage and biochip miniaturization.

Original languageEnglish
Pages (from-to)102-106
Number of pages5
JournalApplied Surface Science
Volume234
Issue number1-4
DOIs
Publication statusPublished - 2004 Jul 15

Fingerprint

Electron beam lithography
Biomolecules
Self assembled monolayers
Silicon
immobilization
DNA
lithography
deoxyribonucleic acid
electron beams
microstructure
Microstructure
silicon
miniaturization
chips
Biochips
oligonucleotides
Oligonucleotides
Fluorescent Dyes
attachment
Dyes

Keywords

  • Biochip
  • Deoxyribonucleic acid
  • DNA
  • EB
  • Immobilization
  • Lithography
  • SAM
  • Self-assembled monolayer

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

Preferential immobilization of biomolecules on silicon microstructure array by means of electron beam lithography on organosilane self-assembled monolayer resist. / Tanii, Takashi; Hosaka, Takumi; Miyake, Takeo; Zhang, Guo Jun; Zako, Tamotsu; Funatsu, Takashi; Ohdomari, Iwao.

In: Applied Surface Science, Vol. 234, No. 1-4, 15.07.2004, p. 102-106.

Research output: Contribution to journalArticle

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