Preferential immobilization of biomolecules on silicon microstructure array by means of electron beam lithography on organosilane self-assembled monolayer resist

Takashi Tanii*, Takumi Hosaka, Takeo Miyake, Guo Jun Zhang, Tamotsu Zako, Takashi Funatsu, Iwao Ohdomari

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

27 Citations (Scopus)

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Engineering & Materials Science

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Chemical Compounds