Abstract
Results of the preliminary pressure measurement using a picosecond pulsed YAG laser are presented. By this method, pressures in the range of 10-9 Pa were measured for H2 gas. Advantages of this method and the problem of noise are discussed compared with the method using an excimer laser.
| Original language | English |
|---|---|
| Pages (from-to) | L1368-L1369 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 32 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - 1993 Jan 1 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)
Cite this
Preliminary Pressure Measurement in the Range of 10-9 Pa Using a Picosecond Pulsed Laser. / Kokubun, Kiyohide; Sekine, Sigeyuki; Ichimura, Shingo; Shimizu, Hazime.
In: Japanese Journal of Applied Physics, Vol. 32, No. 9, 01.01.1993, p. L1368-L1369.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Preliminary Pressure Measurement in the Range of 10-9 Pa Using a Picosecond Pulsed Laser
AU - Kokubun, Kiyohide
AU - Sekine, Sigeyuki
AU - Ichimura, Shingo
AU - Shimizu, Hazime
PY - 1993/1/1
Y1 - 1993/1/1
N2 - Results of the preliminary pressure measurement using a picosecond pulsed YAG laser are presented. By this method, pressures in the range of 10-9 Pa were measured for H2 gas. Advantages of this method and the problem of noise are discussed compared with the method using an excimer laser.
AB - Results of the preliminary pressure measurement using a picosecond pulsed YAG laser are presented. By this method, pressures in the range of 10-9 Pa were measured for H2 gas. Advantages of this method and the problem of noise are discussed compared with the method using an excimer laser.
UR - http://www.scopus.com/inward/record.url?scp=0027660396&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0027660396&partnerID=8YFLogxK
U2 - 10.1143/JJAP.32.L1368
DO - 10.1143/JJAP.32.L1368
M3 - Article
AN - SCOPUS:0027660396
VL - 32
SP - L1368-L1369
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 9
ER -