Preliminary Pressure Measurement in the Range of 10-9 Pa Using a Picosecond Pulsed Laser

Kiyohide Kokubun, Sigeyuki Sekine, Shingo Ichimura, Hazime Shimizu

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Results of the preliminary pressure measurement using a picosecond pulsed YAG laser are presented. By this method, pressures in the range of 10-9 Pa were measured for H2 gas. Advantages of this method and the problem of noise are discussed compared with the method using an excimer laser.

Original languageEnglish
Pages (from-to)L1368-L1369
JournalJapanese Journal of Applied Physics
Issue number9
Publication statusPublished - 1993 Jan 1
Externally publishedYes


ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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