TY - JOUR
T1 - Preliminary results of vacuum pressure measurement by Laser Ionization method
AU - Ichimura, Shingo
AU - Kokubun, Kiyohide
AU - Shimizu, Hazime
PY - 1987/5
Y1 - 1987/5
N2 - The possibility of vacuum pressure measurement by ionizing gaseous atoms or molecules with laser radiation was studied. Xe ions were successfully detected after irradiation by a focused Xe-Cl excimer laser, indicating that non-resonant 4 photon ionization was realized with the present system. It was confirmed that Xe signal intensity, as measured by a quadrapole mass analyzer, changed in proportion to Xe gas pressure from 10-5Torr to 10-9Torr. Xe isotopes were also measured and the results correlated well with their natural abundance.
AB - The possibility of vacuum pressure measurement by ionizing gaseous atoms or molecules with laser radiation was studied. Xe ions were successfully detected after irradiation by a focused Xe-Cl excimer laser, indicating that non-resonant 4 photon ionization was realized with the present system. It was confirmed that Xe signal intensity, as measured by a quadrapole mass analyzer, changed in proportion to Xe gas pressure from 10-5Torr to 10-9Torr. Xe isotopes were also measured and the results correlated well with their natural abundance.
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U2 - 10.1143/JJAP.26.L573
DO - 10.1143/JJAP.26.L573
M3 - Article
AN - SCOPUS:0023344385
SN - 0021-4922
VL - 26
SP - L573-L575
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 5A
ER -