Preliminary results of vacuum pressure measurement by Laser Ionization method

Shingo Ichimura, Kiyohide Kokubun, Hazime Shimizu

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

The possibility of vacuum pressure measurement by ionizing gaseous atoms or molecules with laser radiation was studied. Xe ions were successfully detected after irradiation by a focused Xe-Cl excimer laser, indicating that non-resonant 4 photon ionization was realized with the present system. It was confirmed that Xe signal intensity, as measured by a quadrapole mass analyzer, changed in proportion to Xe gas pressure from 10-5Torr to 10-9Torr. Xe isotopes were also measured and the results correlated well with their natural abundance.

Original languageEnglish
Pages (from-to)L573-L575
JournalJapanese journal of applied physics
Volume26
Issue number5A
DOIs
Publication statusPublished - 1987 May
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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