Preparation and characterization of wide area, high quality diamond film using magnetoactive plasma chemical vapour deposition

Engineering & Materials Science

• Diamond films 100%
• Chemical vapor deposition 77%
• Diamonds 66%
• Plasmas 61%
• Electron cyclotron resonance 47%
• Microwaves 23%
• Plasma deposition 21%
• Plasma density 21%
• Magnetic fields 11%
• Temperature 5%

Physics & Astronomy

• diamond films 72%
• diamonds 52%
• vapor deposition 50%
• preparation 48%
• characterization 36%
• electron cyclotron resonance 29%
• low pressure 22%
• microwave absorption 15%
• plasma density 12%
• microwaves 8%
• magnetic fields 6%
• temperature 3%
• energy 3%

Chemical Compounds

• Plasma Chemical Vapour Deposition 89%
• Diamond 62%
• Electron Cyclotron Resonance 34%
• Liquid Film 32%
• Plasma 27%
• Microwave Absorption 13%
• Pressure 12%
• Magnetic Field 10%
• Microwave 8%
• Energy 5%