Preparation of Cd1-xYxSb2O6 thin film on glass substrate by radio frequency sputtering

Kazuhiko Yanagawa, Yoshimichi Ohki, Takahisa Omata, Hideo Hosono, Naoyuki Ueda, Hiroshi Kawazoe

    Research output: Contribution to journalArticle

    37 Citations (Scopus)

    Abstract

    Cd1-xYxSb2O6 thin films were deposited onto a silica glass substrate by rf sputtering method. The highest conductivity observed for Cd0.95Y0.05Sb2O 6 thin films was 4.1×10 S cm-1, with a carrier concentration of 1.3×1020 cm-3 and a Hall mobility of 1.9 cm2 V-1S -1. No distinct optical absorption band was observed from the visible to the infrared region. These observations show that Cd1-xYxSb2O6 thin films have characteristics of a transparent conductor, whose transparent wavelength region covers the near infrared.

    Original languageEnglish
    Pages (from-to)406-408
    Number of pages3
    JournalApplied Physics Letters
    Volume65
    Issue number4
    DOIs
    Publication statusPublished - 1994

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    radio frequencies
    sputtering
    preparation
    glass
    thin films
    silica glass
    optical absorption
    conductors
    absorption spectra
    conductivity
    wavelengths

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)

    Cite this

    Preparation of Cd1-xYxSb2O6 thin film on glass substrate by radio frequency sputtering. / Yanagawa, Kazuhiko; Ohki, Yoshimichi; Omata, Takahisa; Hosono, Hideo; Ueda, Naoyuki; Kawazoe, Hiroshi.

    In: Applied Physics Letters, Vol. 65, No. 4, 1994, p. 406-408.

    Research output: Contribution to journalArticle

    Yanagawa, Kazuhiko ; Ohki, Yoshimichi ; Omata, Takahisa ; Hosono, Hideo ; Ueda, Naoyuki ; Kawazoe, Hiroshi. / Preparation of Cd1-xYxSb2O6 thin film on glass substrate by radio frequency sputtering. In: Applied Physics Letters. 1994 ; Vol. 65, No. 4. pp. 406-408.
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    AU - Ueda, Naoyuki

    AU - Kawazoe, Hiroshi

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