Preparation of Cd1-xYxSb2O6 thin film on glass substrate by radio frequency sputtering

Kazuhiko Yanagawa*, Yoshimichi Ohki, Takahisa Omata, Hideo Hosono, Naoyuki Ueda, Hiroshi Kawazoe

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

39 Citations (Scopus)


Cd1-xYxSb2O6 thin films were deposited onto a silica glass substrate by rf sputtering method. The highest conductivity observed for Cd0.95Y0.05Sb2O 6 thin films was 4.1×10 S cm-1, with a carrier concentration of 1.3×1020 cm-3 and a Hall mobility of 1.9 cm2 V-1S -1. No distinct optical absorption band was observed from the visible to the infrared region. These observations show that Cd1-xYxSb2O6 thin films have characteristics of a transparent conductor, whose transparent wavelength region covers the near infrared.

Original languageEnglish
Pages (from-to)406-408
Number of pages3
JournalApplied Physics Letters
Issue number4
Publication statusPublished - 1994

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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