TY - JOUR
T1 - Pressure Measurement in XHV Region Using Nonresonant Multiphoton Ionization by Picosecond Pulsed Laser
AU - Kokubun, Kiyohide
AU - Sekine, Shigeyuki
AU - Ichimura, Shingo
AU - Kurokawa, Akira
AU - Shimizu, Hazime
N1 - Copyright:
Copyright 2016 Elsevier B.V., All rights reserved.
PY - 1994
Y1 - 1994
N2 - By means of nonresonant multiphoton ionization using a picosecond pulsed YAG laser, pressure measurement for H2, CO and CO2 gases was carried out in the XHV pressure range. It was experimentally verified that pressure measurement was possible in the range of 10-11 Pa, and this pressure measurement method had pressure sensitivity of the same order of magnitude for the three molecules.
AB - By means of nonresonant multiphoton ionization using a picosecond pulsed YAG laser, pressure measurement for H2, CO and CO2 gases was carried out in the XHV pressure range. It was experimentally verified that pressure measurement was possible in the range of 10-11 Pa, and this pressure measurement method had pressure sensitivity of the same order of magnitude for the three molecules.
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U2 - 10.3131/jvsj.37.711
DO - 10.3131/jvsj.37.711
M3 - Article
AN - SCOPUS:85007784731
VL - 37
SP - 711
EP - 713
JO - Shinku/Journal of the Vacuum Society of Japan
JF - Shinku/Journal of the Vacuum Society of Japan
SN - 0559-8516
IS - 9
ER -