Abstract
By means of nonresonant multiphoton ionization using a picosecond pulsed YAG laser, pressure measurement for H2, CO and CO2 gases was carried out in the XHV pressure range. It was experimentally verified that pressure measurement was possible in the range of 10-11 Pa, and this pressure measurement method had pressure sensitivity of the same order of magnitude for the three molecules.
| Original language | English |
|---|---|
| Pages (from-to) | 711-713 |
| Number of pages | 3 |
| Journal | Shinku |
| Volume | 37 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - 1994 Jan 1 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
Cite this
Pressure Measurement in XHV Region Using Nonresonant Multiphoton Ionization by Picosecond Pulsed Laser. / Kokubun, Kiyohide; Sekine, Shigeyuki; Ichimura, Shingo; Kurokawa, Akira; Shimizu, Hazime.
In: Shinku, Vol. 37, No. 9, 01.01.1994, p. 711-713.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Pressure Measurement in XHV Region Using Nonresonant Multiphoton Ionization by Picosecond Pulsed Laser
AU - Kokubun, Kiyohide
AU - Sekine, Shigeyuki
AU - Ichimura, Shingo
AU - Kurokawa, Akira
AU - Shimizu, Hazime
PY - 1994/1/1
Y1 - 1994/1/1
N2 - By means of nonresonant multiphoton ionization using a picosecond pulsed YAG laser, pressure measurement for H2, CO and CO2 gases was carried out in the XHV pressure range. It was experimentally verified that pressure measurement was possible in the range of 10-11 Pa, and this pressure measurement method had pressure sensitivity of the same order of magnitude for the three molecules.
AB - By means of nonresonant multiphoton ionization using a picosecond pulsed YAG laser, pressure measurement for H2, CO and CO2 gases was carried out in the XHV pressure range. It was experimentally verified that pressure measurement was possible in the range of 10-11 Pa, and this pressure measurement method had pressure sensitivity of the same order of magnitude for the three molecules.
UR - http://www.scopus.com/inward/record.url?scp=85007784731&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85007784731&partnerID=8YFLogxK
U2 - 10.3131/jvsj.37.711
DO - 10.3131/jvsj.37.711
M3 - Article
AN - SCOPUS:85007784731
VL - 37
SP - 711
EP - 713
JO - Journal of the Vacuum Society of Japan
JF - Journal of the Vacuum Society of Japan
SN - 1882-2398
IS - 9
ER -