Pressure Measurement in XHV Region Using Nonresonant Multiphoton Ionization by Picosecond Pulsed Laser

Kiyohide Kokubun; Shigeyuki Sekine; Shingo Ichimura; Akira Kurokawa; Hazime Shimizu

doi:10.3131/jvsj.37.711

Pressure Measurement in XHV Region Using Nonresonant Multiphoton Ionization by Picosecond Pulsed Laser

Kiyohide Kokubun, Shigeyuki Sekine, Shingo Ichimura, Akira Kurokawa, Hazime Shimizu

Research output: Contribution to journal › Article

3 Citations (Scopus)

Abstract

By means of nonresonant multiphoton ionization using a picosecond pulsed YAG laser, pressure measurement for H₂, CO and CO₂ gases was carried out in the XHV pressure range. It was experimentally verified that pressure measurement was possible in the range of 10-11 Pa, and this pressure measurement method had pressure sensitivity of the same order of magnitude for the three molecules.

Original language	English
Pages (from-to)	711-713
Number of pages	3
Journal	Shinku
Volume	37
Issue number	9
DOIs	https://doi.org/10.3131/jvsj.37.711
Publication status	Published - 1994 Jan 1
Externally published	Yes

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ASJC Scopus subject areas

Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

Cite this

Kokubun, K., Sekine, S., Ichimura, S., Kurokawa, A., & Shimizu, H. (1994). Pressure Measurement in XHV Region Using Nonresonant Multiphoton Ionization by Picosecond Pulsed Laser. Shinku, 37(9), 711-713. https://doi.org/10.3131/jvsj.37.711

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10.3131/jvsj.37.711