Pressure Measurement in XHV Region Using Nonresonant Multiphoton Ionization by Picosecond Pulsed Laser

Kiyohide Kokubun, Shigeyuki Sekine, Shingo Ichimura, Akira Kurokawa, Hazime Shimizu

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

By means of nonresonant multiphoton ionization using a picosecond pulsed YAG laser, pressure measurement for H2, CO and CO2 gases was carried out in the XHV pressure range. It was experimentally verified that pressure measurement was possible in the range of 10-11 Pa, and this pressure measurement method had pressure sensitivity of the same order of magnitude for the three molecules.

Original languageEnglish
Pages (from-to)711-713
Number of pages3
JournalShinku
Volume37
Issue number9
DOIs
Publication statusPublished - 1994 Jan 1
Externally publishedYes

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ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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