Pressure measurement of 10-10 to 10-12 Pa by nonresonant multiphoton ionization

K. Kokubun, S. Sekine, S. Ichimura, A. Kurokawa, H. Shimizu

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


In order to increase the ion-detection efficiency of the pressure measurement method using nonresonant multiphoton ionization, an ion-detection head was improved. Using this head, pressure measurements were carried out for H2 and Xe in the extreme high vacuum region. As a result, for H2, by optimizing an incident ion energy, the efficiency increased by a factor of about 2.5. For Xe, without optimizing the incident ion energy, it increased by a factor of about 1.5.

Original languageEnglish
Pages (from-to)557-559
Number of pages3
Issue number6-8
Publication statusPublished - 1996
Externally publishedYes


  • Extreme high vacuum
  • H
  • Ion-detection efficiency
  • Nonresonant multiphoton ionization
  • Pressure measurement
  • Xe

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films


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