Pressure Measurement with Laser 1. Laser-ionization Characteristics of Various Kinds of Gases

Kiyohide Kokubun; Shingo Ichimura; Hazime Shimizu

doi:10.3131/jvsj.33.7

Pressure Measurement with Laser 1. Laser-ionization Characteristics of Various Kinds of Gases

Kiyohide Kokubun, Shingo Ichimura, Hazime Shimizu

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

For the purpose of applying the laser-ionization method to measuring gas pressure, particularly in the range of UHV and XHV, the laser-ionization characteristics for various kinds of gases have been studied using XeCl, KrF and ArF ex-cimer lasers. The proportional relation between the ionization signal and the gas pressure was experimentally verified to 1 × 10^-8 Torr (1.3 × 10^-6 Pa). In the case of rare gases and O₂ gas, the dependence of the ionization signal on the laser intensity was in agreement with the theory of nonresonant multiphoton ionization. Saturation of ionization was observed in the case of Xe.

Original language	English
Pages (from-to)	7-14
Number of pages	8
Journal	Shinku/Journal of the Vacuum Society of Japan
Volume	33
Issue number	1
DOIs	https://doi.org/10.3131/jvsj.33.7
Publication status	Published - 1990
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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abstract = "For the purpose of applying the laser-ionization method to measuring gas pressure, particularly in the range of UHV and XHV, the laser-ionization characteristics for various kinds of gases have been studied using XeCl, KrF and ArF ex-cimer lasers. The proportional relation between the ionization signal and the gas pressure was experimentally verified to 1 × 10-8 Torr (1.3 × 10-6 Pa). In the case of rare gases and O2 gas, the dependence of the ionization signal on the laser intensity was in agreement with the theory of nonresonant multiphoton ionization. Saturation of ionization was observed in the case of Xe.",

author = "Kiyohide Kokubun and Shingo Ichimura and Hazime Shimizu",

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AU - Ichimura, Shingo

AU - Shimizu, Hazime

PY - 1990

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N2 - For the purpose of applying the laser-ionization method to measuring gas pressure, particularly in the range of UHV and XHV, the laser-ionization characteristics for various kinds of gases have been studied using XeCl, KrF and ArF ex-cimer lasers. The proportional relation between the ionization signal and the gas pressure was experimentally verified to 1 × 10-8 Torr (1.3 × 10-6 Pa). In the case of rare gases and O2 gas, the dependence of the ionization signal on the laser intensity was in agreement with the theory of nonresonant multiphoton ionization. Saturation of ionization was observed in the case of Xe.

AB - For the purpose of applying the laser-ionization method to measuring gas pressure, particularly in the range of UHV and XHV, the laser-ionization characteristics for various kinds of gases have been studied using XeCl, KrF and ArF ex-cimer lasers. The proportional relation between the ionization signal and the gas pressure was experimentally verified to 1 × 10-8 Torr (1.3 × 10-6 Pa). In the case of rare gases and O2 gas, the dependence of the ionization signal on the laser intensity was in agreement with the theory of nonresonant multiphoton ionization. Saturation of ionization was observed in the case of Xe.

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Pressure Measurement with Laser 1. Laser-ionization Characteristics of Various Kinds of Gases

Abstract

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