Pressure Measurement with Laser 2. A New Ion Counting System for Laser Generated Ions

Shingo Ichimura, Kiyohide Kokubun, Hazime Shimizu

Research output: Contribution to journalArticle


A new ion counting system useful in pressure measurement with laser was constructed. The system is composed of a microchannel-plate intensifier, a CCD camera, a frame buffer, a particle counter, and a personal computer. By applying it to detection of acetone ions ionized by an excimer laser pulse, it was confirmed that the system has i) a high peak counting rate (exceeding 1010 cps), ii) linear response to the number of incident ions, and iii) higher accuracy than conventional analog detection system. The detection limit in the pressure measurement by laser with the present system is also discussed, and the measurement in the pressure range between 10-10 Pa and 10° Pa is projected.

Original languageEnglish
Pages (from-to)15-20
Number of pages6
Issue number1
Publication statusPublished - 1990 Jan 1
Externally publishedYes


ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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