Pressure Measurement with Laser 2. A New Ion Counting System for Laser Generated Ions

Shingo Ichimura, Kiyohide Kokubun, Hazime Shimizu

Research output: Contribution to journalArticle

Abstract

A new ion counting system useful in pressure measurement with laser was constructed. The system is composed of a microchannel-plate intensifier, a CCD camera, a frame buffer, a particle counter, and a personal computer. By applying it to detection of acetone ions ionized by an excimer laser pulse, it was confirmed that the system has i) a high peak counting rate (exceeding 1010 cps), ii) linear response to the number of incident ions, and iii) higher accuracy than conventional analog detection system. The detection limit in the pressure measurement by laser with the present system is also discussed, and the measurement in the pressure range between 10-10 Pa and 10° Pa is projected.

Original languageEnglish
Pages (from-to)15-20
Number of pages6
JournalShinku
Volume33
Issue number1
DOIs
Publication statusPublished - 1990 Jan 1
Externally publishedYes

Fingerprint

pressure measurement
Pressure measurement
counting
Ions
Lasers
intensifiers
lasers
ions
Radiation counters
microchannel plates
radiation counters
personal computers
Excimer lasers
CCD cameras
Acetone
Microchannels
Personal computers
excimer lasers
acetone
Laser pulses

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Pressure Measurement with Laser 2. A New Ion Counting System for Laser Generated Ions. / Ichimura, Shingo; Kokubun, Kiyohide; Shimizu, Hazime.

In: Shinku, Vol. 33, No. 1, 01.01.1990, p. 15-20.

Research output: Contribution to journalArticle

Ichimura, Shingo ; Kokubun, Kiyohide ; Shimizu, Hazime. / Pressure Measurement with Laser 2. A New Ion Counting System for Laser Generated Ions. In: Shinku. 1990 ; Vol. 33, No. 1. pp. 15-20.
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