Abstract
A new ion counting system useful in pressure measurement with laser was constructed. The system is composed of a microchannel-plate intensifier, a CCD camera, a frame buffer, a particle counter, and a personal computer. By applying it to detection of acetone ions ionized by an excimer laser pulse, it was confirmed that the system has i) a high peak counting rate (exceeding 1010 cps), ii) linear response to the number of incident ions, and iii) higher accuracy than conventional analog detection system. The detection limit in the pressure measurement by laser with the present system is also discussed, and the measurement in the pressure range between 10-10 Pa and 10° Pa is projected.
| Original language | English |
|---|---|
| Pages (from-to) | 15-20 |
| Number of pages | 6 |
| Journal | Shinku |
| Volume | 33 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 1990 Jan 1 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
Cite this
Pressure Measurement with Laser 2. A New Ion Counting System for Laser Generated Ions. / Ichimura, Shingo; Kokubun, Kiyohide; Shimizu, Hazime.
In: Shinku, Vol. 33, No. 1, 01.01.1990, p. 15-20.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Pressure Measurement with Laser 2. A New Ion Counting System for Laser Generated Ions
AU - Ichimura, Shingo
AU - Kokubun, Kiyohide
AU - Shimizu, Hazime
PY - 1990/1/1
Y1 - 1990/1/1
N2 - A new ion counting system useful in pressure measurement with laser was constructed. The system is composed of a microchannel-plate intensifier, a CCD camera, a frame buffer, a particle counter, and a personal computer. By applying it to detection of acetone ions ionized by an excimer laser pulse, it was confirmed that the system has i) a high peak counting rate (exceeding 1010 cps), ii) linear response to the number of incident ions, and iii) higher accuracy than conventional analog detection system. The detection limit in the pressure measurement by laser with the present system is also discussed, and the measurement in the pressure range between 10-10 Pa and 10° Pa is projected.
AB - A new ion counting system useful in pressure measurement with laser was constructed. The system is composed of a microchannel-plate intensifier, a CCD camera, a frame buffer, a particle counter, and a personal computer. By applying it to detection of acetone ions ionized by an excimer laser pulse, it was confirmed that the system has i) a high peak counting rate (exceeding 1010 cps), ii) linear response to the number of incident ions, and iii) higher accuracy than conventional analog detection system. The detection limit in the pressure measurement by laser with the present system is also discussed, and the measurement in the pressure range between 10-10 Pa and 10° Pa is projected.
UR - http://www.scopus.com/inward/record.url?scp=85004245888&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85004245888&partnerID=8YFLogxK
U2 - 10.3131/jvsj.33.15
DO - 10.3131/jvsj.33.15
M3 - Article
AN - SCOPUS:85004245888
VL - 33
SP - 15
EP - 20
JO - Journal of the Vacuum Society of Japan
JF - Journal of the Vacuum Society of Japan
SN - 1882-2398
IS - 1
ER -