Pressure Measurement with Laser 2. A New Ion Counting System for Laser Generated Ions

Shingo Ichimura; Kiyohide Kokubun; Hazime Shimizu

doi:10.3131/jvsj.33.15

Pressure Measurement with Laser 2. A New Ion Counting System for Laser Generated Ions

Shingo Ichimura, Kiyohide Kokubun, Hazime Shimizu

Research output: Contribution to journal › Article › peer-review

Abstract

A new ion counting system useful in pressure measurement with laser was constructed. The system is composed of a microchannel-plate intensifier, a CCD camera, a frame buffer, a particle counter, and a personal computer. By applying it to detection of acetone ions ionized by an excimer laser pulse, it was confirmed that the system has i) a high peak counting rate (exceeding 10¹⁰ cps), ii) linear response to the number of incident ions, and iii) higher accuracy than conventional analog detection system. The detection limit in the pressure measurement by laser with the present system is also discussed, and the measurement in the pressure range between 10^-10 Pa and 10° Pa is projected.

Original language	English
Pages (from-to)	15-20
Number of pages	6
Journal	Shinku/Journal of the Vacuum Society of Japan
Volume	33
Issue number	1
DOIs	https://doi.org/10.3131/jvsj.33.15
Publication status	Published - 1990
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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abstract = "A new ion counting system useful in pressure measurement with laser was constructed. The system is composed of a microchannel-plate intensifier, a CCD camera, a frame buffer, a particle counter, and a personal computer. By applying it to detection of acetone ions ionized by an excimer laser pulse, it was confirmed that the system has i) a high peak counting rate (exceeding 1010 cps), ii) linear response to the number of incident ions, and iii) higher accuracy than conventional analog detection system. The detection limit in the pressure measurement by laser with the present system is also discussed, and the measurement in the pressure range between 10-10 Pa and 10° Pa is projected.",

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AB - A new ion counting system useful in pressure measurement with laser was constructed. The system is composed of a microchannel-plate intensifier, a CCD camera, a frame buffer, a particle counter, and a personal computer. By applying it to detection of acetone ions ionized by an excimer laser pulse, it was confirmed that the system has i) a high peak counting rate (exceeding 1010 cps), ii) linear response to the number of incident ions, and iii) higher accuracy than conventional analog detection system. The detection limit in the pressure measurement by laser with the present system is also discussed, and the measurement in the pressure range between 10-10 Pa and 10° Pa is projected.

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Pressure Measurement with Laser 2. A New Ion Counting System for Laser Generated Ions

Abstract

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