Production of active oxygen by ion source

Hiroshi Murakami, Hug J. Kang, Akira Kurokawa, Ken Nakamura, Shingo Ichimura

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)333-335
Number of pages3
JournalShinku/Journal of the Vacuum Society of Japan
Volume40
Issue number3
DOIs
Publication statusPublished - 1997 Jan 1
Externally publishedYes

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Ion sources
Reactive Oxygen Species

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Production of active oxygen by ion source. / Murakami, Hiroshi; Kang, Hug J.; Kurokawa, Akira; Nakamura, Ken; Ichimura, Shingo.

In: Shinku/Journal of the Vacuum Society of Japan, Vol. 40, No. 3, 01.01.1997, p. 333-335.

Research output: Contribution to journalArticle

Murakami, Hiroshi ; Kang, Hug J. ; Kurokawa, Akira ; Nakamura, Ken ; Ichimura, Shingo. / Production of active oxygen by ion source. In: Shinku/Journal of the Vacuum Society of Japan. 1997 ; Vol. 40, No. 3. pp. 333-335.
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