Production of active oxygen by ion source

Hiroshi Murakami; Hug J. Kang; Akira Kurokawa; Ken Nakamura; Shingo Ichimura

doi:10.3131/jvsj.40.333

Production of active oxygen by ion source

Hiroshi Murakami^*, Hug J. Kang, Akira Kurokawa, Ken Nakamura, Shingo Ichimura

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	333-335
Number of pages	3
Journal	Shinku/Journal of the Vacuum Society of Japan
Volume	40
Issue number	3
DOIs	https://doi.org/10.3131/jvsj.40.333
Publication status	Published - 1997
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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@article{b3c99a646200409aa0679a510f916086,

title = "Production of active oxygen by ion source",

author = "Hiroshi Murakami and Kang, {Hug J.} and Akira Kurokawa and Ken Nakamura and Shingo Ichimura",

year = "1997",

doi = "10.3131/jvsj.40.333",

language = "English",

volume = "40",

pages = "333--335",

journal = "Shinku/Journal of the Vacuum Society of Japan",

issn = "0559-8516",

number = "3",

}

TY - JOUR

T1 - Production of active oxygen by ion source

AU - Murakami, Hiroshi

AU - Kang, Hug J.

AU - Kurokawa, Akira

AU - Nakamura, Ken

AU - Ichimura, Shingo

PY - 1997

Y1 - 1997

UR - http://www.scopus.com/inward/record.url?scp=5744254531&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=5744254531&partnerID=8YFLogxK

U2 - 10.3131/jvsj.40.333

DO - 10.3131/jvsj.40.333

M3 - Article

AN - SCOPUS:5744254531

SN - 0559-8516

VL - 40

SP - 333

EP - 335

JO - Shinku/Journal of the Vacuum Society of Japan

JF - Shinku/Journal of the Vacuum Society of Japan

IS - 3

ER -

Production of active oxygen by ion source

ASJC Scopus subject areas

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