Production of active oxygen by ion source

Hiroshi Murakami, Hug J. Kang, Akira Kurokawa, Ken Nakamura, Shingo Ichimura

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)333-335
Number of pages3
JournalShinku/Journal of the Vacuum Society of Japan
Volume40
Issue number3
DOIs
Publication statusPublished - 1997
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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