Propagation characteristics of shear horizontal surface acoustic waves in (112̄0) ZnO film/silica glass substrate structures

Atsushi Tanaka, Takahiko Yanagitani, Mami Matsukawa, Yoshiaki Watanabe

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

This paper presents the propagation characteristics of the shear horizontal surface acoustic wave (SH-SAW) in ZnO (0°, 90°, ψ) (11 2̄ 0) textured ZnO films. ZnO (0°, 90°, 0°) film/interdigital transducer (IDT) electrode/silica glass substrate structures were fabricated by RF magnetron sputtering. Experimental results demonstrate that SH-SAW was clearly excited in these structures. We also theoretically estimated the electromechanical coupling coefficient K2 in the ZnO (0°, 90°, ψ) film/silica glass substrate structure. The theoretical results show that the IDT electrode/ZnO (0°, 90°, 55°) film/silica glass substrate structure had a relatively high K2 value of 3.4%. Moreover, the shear horizontal displacement component of the SH-SAW in this structure is much larger than the transverse and longitudinal displacement components. This structure could be used in SH-SAW sensors for evaluating the electrical properties of liquids.

Original languageEnglish
Pages (from-to)2709-2713
Number of pages5
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume55
Issue number12
DOIs
Publication statusPublished - 2008 Dec
Externally publishedYes

Fingerprint

silica glass
Fused silica
Surface waves
Acoustic waves
shear
propagation
acoustics
Substrates
interdigital transducers
Transducers
Electrodes
Electromechanical coupling
electrodes
Magnetron sputtering
coupling coefficients
Electric properties
magnetron sputtering
electrical properties
Sensors
Liquids

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Acoustics and Ultrasonics
  • Instrumentation

Cite this

Propagation characteristics of shear horizontal surface acoustic waves in (112̄0) ZnO film/silica glass substrate structures. / Tanaka, Atsushi; Yanagitani, Takahiko; Matsukawa, Mami; Watanabe, Yoshiaki.

In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 55, No. 12, 12.2008, p. 2709-2713.

Research output: Contribution to journalArticle

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