This paper presents the propagation characteristics of the shear horizontal surface acoustic wave (SH-SAW) in ZnO (0°, 90°, ψ) (11 2̄ 0) textured ZnO films. ZnO (0°, 90°, 0°) film/interdigital transducer (IDT) electrode/silica glass substrate structures were fabricated by RF magnetron sputtering. Experimental results demonstrate that SH-SAW was clearly excited in these structures. We also theoretically estimated the electromechanical coupling coefficient K2 in the ZnO (0°, 90°, ψ) film/silica glass substrate structure. The theoretical results show that the IDT electrode/ZnO (0°, 90°, 55°) film/silica glass substrate structure had a relatively high K2 value of 3.4%. Moreover, the shear horizontal displacement component of the SH-SAW in this structure is much larger than the transverse and longitudinal displacement components. This structure could be used in SH-SAW sensors for evaluating the electrical properties of liquids.
|Number of pages||5|
|Journal||IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control|
|Publication status||Published - 2008 Dec|
ASJC Scopus subject areas
- Acoustics and Ultrasonics
- Electrical and Electronic Engineering