Prototype miniature blood gas analyser fabricated on a silicon wafer

Shuichi Shoji, Masayoshi Esashi, Tadayuki Matsuo

Research output: Contribution to journalArticle

82 Citations (Scopus)

Abstract

The fabrication of a miniature blood pH monitoring system formed on a silicon wafer using a pH ISFET and a new type of micro-valve actuator is described. The system samples the blood from the vein, measures its pH and calibrates zero drift of the sensor automatically and periodically. The main body of the system, the micro-cell, is made of a silicon wafer and a Pyrex glass plate processed by IC technology (micro-machining). This cell is significantly smaller, lighter and more portable than presently available blood gas analysers, in particular, the sample volume reduction is a very distinctive feature of it. The total necessary sample volume of the system is about 10 μl.

Original languageEnglish
Pages (from-to)101-107
Number of pages7
JournalSensors and Actuators
Volume14
Issue number2
DOIs
Publication statusPublished - 1988
Externally publishedYes

Fingerprint

Silicon wafers
Blood
Gases
Ion sensitive field effect transistors
Machining
Actuators
Fabrication
Glass
Monitoring
Sensors

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Prototype miniature blood gas analyser fabricated on a silicon wafer. / Shoji, Shuichi; Esashi, Masayoshi; Matsuo, Tadayuki.

In: Sensors and Actuators, Vol. 14, No. 2, 1988, p. 101-107.

Research output: Contribution to journalArticle

Shoji, Shuichi ; Esashi, Masayoshi ; Matsuo, Tadayuki. / Prototype miniature blood gas analyser fabricated on a silicon wafer. In: Sensors and Actuators. 1988 ; Vol. 14, No. 2. pp. 101-107.
@article{d9c40c68553d4f1d910df2649bc8f0d5,
title = "Prototype miniature blood gas analyser fabricated on a silicon wafer",
abstract = "The fabrication of a miniature blood pH monitoring system formed on a silicon wafer using a pH ISFET and a new type of micro-valve actuator is described. The system samples the blood from the vein, measures its pH and calibrates zero drift of the sensor automatically and periodically. The main body of the system, the micro-cell, is made of a silicon wafer and a Pyrex glass plate processed by IC technology (micro-machining). This cell is significantly smaller, lighter and more portable than presently available blood gas analysers, in particular, the sample volume reduction is a very distinctive feature of it. The total necessary sample volume of the system is about 10 μl.",
author = "Shuichi Shoji and Masayoshi Esashi and Tadayuki Matsuo",
year = "1988",
doi = "10.1016/0250-6874(88)80057-X",
language = "English",
volume = "14",
pages = "101--107",
journal = "Sensors and Actuators",
issn = "0250-6874",
publisher = "Elsevier BV",
number = "2",

}

TY - JOUR

T1 - Prototype miniature blood gas analyser fabricated on a silicon wafer

AU - Shoji, Shuichi

AU - Esashi, Masayoshi

AU - Matsuo, Tadayuki

PY - 1988

Y1 - 1988

N2 - The fabrication of a miniature blood pH monitoring system formed on a silicon wafer using a pH ISFET and a new type of micro-valve actuator is described. The system samples the blood from the vein, measures its pH and calibrates zero drift of the sensor automatically and periodically. The main body of the system, the micro-cell, is made of a silicon wafer and a Pyrex glass plate processed by IC technology (micro-machining). This cell is significantly smaller, lighter and more portable than presently available blood gas analysers, in particular, the sample volume reduction is a very distinctive feature of it. The total necessary sample volume of the system is about 10 μl.

AB - The fabrication of a miniature blood pH monitoring system formed on a silicon wafer using a pH ISFET and a new type of micro-valve actuator is described. The system samples the blood from the vein, measures its pH and calibrates zero drift of the sensor automatically and periodically. The main body of the system, the micro-cell, is made of a silicon wafer and a Pyrex glass plate processed by IC technology (micro-machining). This cell is significantly smaller, lighter and more portable than presently available blood gas analysers, in particular, the sample volume reduction is a very distinctive feature of it. The total necessary sample volume of the system is about 10 μl.

UR - http://www.scopus.com/inward/record.url?scp=0022732868&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0022732868&partnerID=8YFLogxK

U2 - 10.1016/0250-6874(88)80057-X

DO - 10.1016/0250-6874(88)80057-X

M3 - Article

VL - 14

SP - 101

EP - 107

JO - Sensors and Actuators

JF - Sensors and Actuators

SN - 0250-6874

IS - 2

ER -