Prototype of the high sensitive X-ray microcalorimeter for X-ray imaging

H. Kudo, T. Nakamura, T. Arakawa, S. Ohtsuka, T. Izumi, Shuichi Shoji, S. Sato, H. Kobayashi, K. Mori, Takayuki Homma, Tetsuya Osaka, K. Mitsuda, N. Y. Yamasaki, R. Fujimoto, N. Iyomoto, T. Oshima, K. Futamoto, Y. Takei, T. Ichitsubo, T. FujimoriY. Ishisaki, U. Morita, T. Koga, K. Sato, T. Ohashi, Y. Kuroda, M. Onishi, K. Otake, F. Beppu

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

An X-ray microcalorimeter is a high performance X-ray spectrometer that can achieve both high energy resolution of conventional wavelength dispersive spectrometers (WDS) and high quantum efficiency of energy dispersive spectrometers (EDS). The energy resolution can be theoretically improved to about 1eV, which value is 120 times better than that of conventional Si(Li) spectrometers and nearly 100% of quantum efficiency can be achieved using microabsorbers. In order to realize high energy-resolution X-ray imaging using an array of X-ray microcalorimeters, two types of 2 × 2 X-ray microcalorimeter arrays were fabricated and tested. Using an X-ray microabsorber so-called "mushroom-shaped" X-ray microabsorber, the filling factor was enhanced to about 70%. We tested Sn and Bi as an X-ray microabsorber. Consequently, the Sn absorber degrades the energy resolution because of the long time constant. This problem was cleared using the Bi microabsorber. The achievable energy resolution was also investigated. As a result, the energy resolution of 6.3eV was obtained with the test device.

Original languageEnglish
Pages (from-to)171-175
Number of pages5
JournalSensors and Actuators, A: Physical
Volume114
Issue number2-3
DOIs
Publication statusPublished - 2004 Sep 1

Fingerprint

calorimeters
prototypes
Imaging techniques
X rays
x rays
Spectrometers
spectrometers
Quantum efficiency
energy
quantum efficiency
X ray spectrometers
time constant
absorbers
Wavelength
wavelengths

Keywords

  • Calorimeter
  • Low temperature
  • Spectrometer
  • Temperature sensor
  • X-ray

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation

Cite this

Kudo, H., Nakamura, T., Arakawa, T., Ohtsuka, S., Izumi, T., Shoji, S., ... Beppu, F. (2004). Prototype of the high sensitive X-ray microcalorimeter for X-ray imaging. Sensors and Actuators, A: Physical, 114(2-3), 171-175. https://doi.org/10.1016/j.sna.2003.11.040

Prototype of the high sensitive X-ray microcalorimeter for X-ray imaging. / Kudo, H.; Nakamura, T.; Arakawa, T.; Ohtsuka, S.; Izumi, T.; Shoji, Shuichi; Sato, S.; Kobayashi, H.; Mori, K.; Homma, Takayuki; Osaka, Tetsuya; Mitsuda, K.; Yamasaki, N. Y.; Fujimoto, R.; Iyomoto, N.; Oshima, T.; Futamoto, K.; Takei, Y.; Ichitsubo, T.; Fujimori, T.; Ishisaki, Y.; Morita, U.; Koga, T.; Sato, K.; Ohashi, T.; Kuroda, Y.; Onishi, M.; Otake, K.; Beppu, F.

In: Sensors and Actuators, A: Physical, Vol. 114, No. 2-3, 01.09.2004, p. 171-175.

Research output: Contribution to journalArticle

Kudo, H, Nakamura, T, Arakawa, T, Ohtsuka, S, Izumi, T, Shoji, S, Sato, S, Kobayashi, H, Mori, K, Homma, T, Osaka, T, Mitsuda, K, Yamasaki, NY, Fujimoto, R, Iyomoto, N, Oshima, T, Futamoto, K, Takei, Y, Ichitsubo, T, Fujimori, T, Ishisaki, Y, Morita, U, Koga, T, Sato, K, Ohashi, T, Kuroda, Y, Onishi, M, Otake, K & Beppu, F 2004, 'Prototype of the high sensitive X-ray microcalorimeter for X-ray imaging', Sensors and Actuators, A: Physical, vol. 114, no. 2-3, pp. 171-175. https://doi.org/10.1016/j.sna.2003.11.040
Kudo, H. ; Nakamura, T. ; Arakawa, T. ; Ohtsuka, S. ; Izumi, T. ; Shoji, Shuichi ; Sato, S. ; Kobayashi, H. ; Mori, K. ; Homma, Takayuki ; Osaka, Tetsuya ; Mitsuda, K. ; Yamasaki, N. Y. ; Fujimoto, R. ; Iyomoto, N. ; Oshima, T. ; Futamoto, K. ; Takei, Y. ; Ichitsubo, T. ; Fujimori, T. ; Ishisaki, Y. ; Morita, U. ; Koga, T. ; Sato, K. ; Ohashi, T. ; Kuroda, Y. ; Onishi, M. ; Otake, K. ; Beppu, F. / Prototype of the high sensitive X-ray microcalorimeter for X-ray imaging. In: Sensors and Actuators, A: Physical. 2004 ; Vol. 114, No. 2-3. pp. 171-175.
@article{a259aa7b976a4cc6b617d1829676b59d,
title = "Prototype of the high sensitive X-ray microcalorimeter for X-ray imaging",
abstract = "An X-ray microcalorimeter is a high performance X-ray spectrometer that can achieve both high energy resolution of conventional wavelength dispersive spectrometers (WDS) and high quantum efficiency of energy dispersive spectrometers (EDS). The energy resolution can be theoretically improved to about 1eV, which value is 120 times better than that of conventional Si(Li) spectrometers and nearly 100{\%} of quantum efficiency can be achieved using microabsorbers. In order to realize high energy-resolution X-ray imaging using an array of X-ray microcalorimeters, two types of 2 × 2 X-ray microcalorimeter arrays were fabricated and tested. Using an X-ray microabsorber so-called {"}mushroom-shaped{"} X-ray microabsorber, the filling factor was enhanced to about 70{\%}. We tested Sn and Bi as an X-ray microabsorber. Consequently, the Sn absorber degrades the energy resolution because of the long time constant. This problem was cleared using the Bi microabsorber. The achievable energy resolution was also investigated. As a result, the energy resolution of 6.3eV was obtained with the test device.",
keywords = "Calorimeter, Low temperature, Spectrometer, Temperature sensor, X-ray",
author = "H. Kudo and T. Nakamura and T. Arakawa and S. Ohtsuka and T. Izumi and Shuichi Shoji and S. Sato and H. Kobayashi and K. Mori and Takayuki Homma and Tetsuya Osaka and K. Mitsuda and Yamasaki, {N. Y.} and R. Fujimoto and N. Iyomoto and T. Oshima and K. Futamoto and Y. Takei and T. Ichitsubo and T. Fujimori and Y. Ishisaki and U. Morita and T. Koga and K. Sato and T. Ohashi and Y. Kuroda and M. Onishi and K. Otake and F. Beppu",
year = "2004",
month = "9",
day = "1",
doi = "10.1016/j.sna.2003.11.040",
language = "English",
volume = "114",
pages = "171--175",
journal = "Sensors and Actuators, A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "2-3",

}

TY - JOUR

T1 - Prototype of the high sensitive X-ray microcalorimeter for X-ray imaging

AU - Kudo, H.

AU - Nakamura, T.

AU - Arakawa, T.

AU - Ohtsuka, S.

AU - Izumi, T.

AU - Shoji, Shuichi

AU - Sato, S.

AU - Kobayashi, H.

AU - Mori, K.

AU - Homma, Takayuki

AU - Osaka, Tetsuya

AU - Mitsuda, K.

AU - Yamasaki, N. Y.

AU - Fujimoto, R.

AU - Iyomoto, N.

AU - Oshima, T.

AU - Futamoto, K.

AU - Takei, Y.

AU - Ichitsubo, T.

AU - Fujimori, T.

AU - Ishisaki, Y.

AU - Morita, U.

AU - Koga, T.

AU - Sato, K.

AU - Ohashi, T.

AU - Kuroda, Y.

AU - Onishi, M.

AU - Otake, K.

AU - Beppu, F.

PY - 2004/9/1

Y1 - 2004/9/1

N2 - An X-ray microcalorimeter is a high performance X-ray spectrometer that can achieve both high energy resolution of conventional wavelength dispersive spectrometers (WDS) and high quantum efficiency of energy dispersive spectrometers (EDS). The energy resolution can be theoretically improved to about 1eV, which value is 120 times better than that of conventional Si(Li) spectrometers and nearly 100% of quantum efficiency can be achieved using microabsorbers. In order to realize high energy-resolution X-ray imaging using an array of X-ray microcalorimeters, two types of 2 × 2 X-ray microcalorimeter arrays were fabricated and tested. Using an X-ray microabsorber so-called "mushroom-shaped" X-ray microabsorber, the filling factor was enhanced to about 70%. We tested Sn and Bi as an X-ray microabsorber. Consequently, the Sn absorber degrades the energy resolution because of the long time constant. This problem was cleared using the Bi microabsorber. The achievable energy resolution was also investigated. As a result, the energy resolution of 6.3eV was obtained with the test device.

AB - An X-ray microcalorimeter is a high performance X-ray spectrometer that can achieve both high energy resolution of conventional wavelength dispersive spectrometers (WDS) and high quantum efficiency of energy dispersive spectrometers (EDS). The energy resolution can be theoretically improved to about 1eV, which value is 120 times better than that of conventional Si(Li) spectrometers and nearly 100% of quantum efficiency can be achieved using microabsorbers. In order to realize high energy-resolution X-ray imaging using an array of X-ray microcalorimeters, two types of 2 × 2 X-ray microcalorimeter arrays were fabricated and tested. Using an X-ray microabsorber so-called "mushroom-shaped" X-ray microabsorber, the filling factor was enhanced to about 70%. We tested Sn and Bi as an X-ray microabsorber. Consequently, the Sn absorber degrades the energy resolution because of the long time constant. This problem was cleared using the Bi microabsorber. The achievable energy resolution was also investigated. As a result, the energy resolution of 6.3eV was obtained with the test device.

KW - Calorimeter

KW - Low temperature

KW - Spectrometer

KW - Temperature sensor

KW - X-ray

UR - http://www.scopus.com/inward/record.url?scp=4344571009&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=4344571009&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2003.11.040

DO - 10.1016/j.sna.2003.11.040

M3 - Article

AN - SCOPUS:4344571009

VL - 114

SP - 171

EP - 175

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

SN - 0924-4247

IS - 2-3

ER -