Prototype of the multi-pixel X-ray microcalorimeter

H. Kudo, T. Nakamura, T. Arakawa, S. Ohtsuka, T. Izumi, Shuichi Shoji, H. Sato, H. Kobayashi, K. Mori, Takayuki Homma, Tetsuya Osaka, K. Mitsuda, N. Y. Yamasaki, R. Fujimoto, N. Iyomoto, T. Oshima, K. Futamoto, Y. Takei, T. Ichitsubo, T. Fujimori & 8 others Y. Ishisaki, U. Morita, T. Koga, K. Sato, T. Ohashi, Y. Kuroda, M. Onishi, K. Otake

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

An X-ray microcalorimeter is a noble X-ray spectrometer that can be used for photon counting with a high energy resolution comparable to the gratings. A 2x2 X-ray microcalorimeter array was fabricated and tested. Due to the purpose of imaging applications, we have applied so-called 'mushroom-shaped' X-ray micro absorber fabricated using two-step exposure and electrodeposition process. The energy resolution of 180 eV(FWHM) at 5.9 keV was obtained with the first prototype of the X-ray microcalorimeter array using Sn micro absorber. By using Bi absorber, it is estimated that the energy resolution can be improved up to 4.5 eV.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1108-1111
Number of pages4
Volume2
ISBN (Print)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003 Jun 82003 Jun 12

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03/6/803/6/12

Fingerprint

Pixels
X rays
X ray spectrometers
Full width at half maximum
Electrodeposition
Photons
Imaging techniques

Keywords

  • Bismuth
  • Energy resolution
  • Gratings
  • High-resolution imaging
  • Optical imaging
  • Prototypes
  • Spectroscopy
  • Testing
  • Tin
  • X-ray imaging

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Kudo, H., Nakamura, T., Arakawa, T., Ohtsuka, S., Izumi, T., Shoji, S., ... Otake, K. (2003). Prototype of the multi-pixel X-ray microcalorimeter. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (Vol. 2, pp. 1108-1111). [1216963] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1216963

Prototype of the multi-pixel X-ray microcalorimeter. / Kudo, H.; Nakamura, T.; Arakawa, T.; Ohtsuka, S.; Izumi, T.; Shoji, Shuichi; Sato, H.; Kobayashi, H.; Mori, K.; Homma, Takayuki; Osaka, Tetsuya; Mitsuda, K.; Yamasaki, N. Y.; Fujimoto, R.; Iyomoto, N.; Oshima, T.; Futamoto, K.; Takei, Y.; Ichitsubo, T.; Fujimori, T.; Ishisaki, Y.; Morita, U.; Koga, T.; Sato, K.; Ohashi, T.; Kuroda, Y.; Onishi, M.; Otake, K.

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 2 Institute of Electrical and Electronics Engineers Inc., 2003. p. 1108-1111 1216963.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kudo, H, Nakamura, T, Arakawa, T, Ohtsuka, S, Izumi, T, Shoji, S, Sato, H, Kobayashi, H, Mori, K, Homma, T, Osaka, T, Mitsuda, K, Yamasaki, NY, Fujimoto, R, Iyomoto, N, Oshima, T, Futamoto, K, Takei, Y, Ichitsubo, T, Fujimori, T, Ishisaki, Y, Morita, U, Koga, T, Sato, K, Ohashi, T, Kuroda, Y, Onishi, M & Otake, K 2003, Prototype of the multi-pixel X-ray microcalorimeter. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. vol. 2, 1216963, Institute of Electrical and Electronics Engineers Inc., pp. 1108-1111, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 03/6/8. https://doi.org/10.1109/SENSOR.2003.1216963
Kudo H, Nakamura T, Arakawa T, Ohtsuka S, Izumi T, Shoji S et al. Prototype of the multi-pixel X-ray microcalorimeter. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 2. Institute of Electrical and Electronics Engineers Inc. 2003. p. 1108-1111. 1216963 https://doi.org/10.1109/SENSOR.2003.1216963
Kudo, H. ; Nakamura, T. ; Arakawa, T. ; Ohtsuka, S. ; Izumi, T. ; Shoji, Shuichi ; Sato, H. ; Kobayashi, H. ; Mori, K. ; Homma, Takayuki ; Osaka, Tetsuya ; Mitsuda, K. ; Yamasaki, N. Y. ; Fujimoto, R. ; Iyomoto, N. ; Oshima, T. ; Futamoto, K. ; Takei, Y. ; Ichitsubo, T. ; Fujimori, T. ; Ishisaki, Y. ; Morita, U. ; Koga, T. ; Sato, K. ; Ohashi, T. ; Kuroda, Y. ; Onishi, M. ; Otake, K. / Prototype of the multi-pixel X-ray microcalorimeter. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 2 Institute of Electrical and Electronics Engineers Inc., 2003. pp. 1108-1111
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AU - Arakawa, T.

AU - Ohtsuka, S.

AU - Izumi, T.

AU - Shoji, Shuichi

AU - Sato, H.

AU - Kobayashi, H.

AU - Mori, K.

AU - Homma, Takayuki

AU - Osaka, Tetsuya

AU - Mitsuda, K.

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AU - Fujimoto, R.

AU - Iyomoto, N.

AU - Oshima, T.

AU - Futamoto, K.

AU - Takei, Y.

AU - Ichitsubo, T.

AU - Fujimori, T.

AU - Ishisaki, Y.

AU - Morita, U.

AU - Koga, T.

AU - Sato, K.

AU - Ohashi, T.

AU - Kuroda, Y.

AU - Onishi, M.

AU - Otake, K.

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KW - Gratings

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KW - Spectroscopy

KW - Testing

KW - Tin

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