Pyrolyzed polymer MESH electrode integrated into fluidic channel for gate type sensor

Kensaku Yamamoto, Keisuke Naka, Yasuhiro Nagaura, Hironobu Sato, Shuichi Shoji, Satoshi Konishi

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    12 Citations (Scopus)

    Abstract

    This paper presents a novel means of introducing conductive pyrolyzed polymer structures into a μTAS platform. Insulation structures of polymer materials can be transformed into conductive structures through pyrolysis, and MEMS structures consisting of pyrolyzed polymer can be formed by a dual process of micromachining and pyrolysis. This work focuses on gate type sensing by a three-dimensional pyrolyzed polymer electrode. The three-dimensional SU-8 original structure was micromachined by multi-angle inclined lithography. Three-dimensional structures of pyrolyzed SU-8, which have meshes of 10 μm × 20 μm in dimension, could be obtained by pyrolysis in N2 atmosphere. Furthermore, the structures were integrated into the SU-8 fluidic channel with the 100 μm in height and 200 μm in width by a post-pyrolysis process. We will demonstrate the cross sectional sensing in electrochemical detection by making the best use of the three-dimensional mesh structure to overcome the restriction of planar electrode.

    Original languageEnglish
    Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
    Pages271-274
    Number of pages4
    Publication statusPublished - 2007
    Event20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe
    Duration: 2007 Jan 212007 Jan 25

    Other

    Other20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
    CityKobe
    Period07/1/2107/1/25

    Fingerprint

    fluidics
    Fluidics
    pyrolysis
    Polymers
    Pyrolysis
    Electrodes
    electrodes
    sensors
    Sensors
    polymers
    mesh
    Micromachining
    micromachining
    insulation
    Lithography
    microelectromechanical systems
    MEMS
    Insulation
    constrictions
    lithography

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Mechanical Engineering
    • Condensed Matter Physics
    • Electronic, Optical and Magnetic Materials

    Cite this

    Yamamoto, K., Naka, K., Nagaura, Y., Sato, H., Shoji, S., & Konishi, S. (2007). Pyrolyzed polymer MESH electrode integrated into fluidic channel for gate type sensor. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 271-274). [4432966]

    Pyrolyzed polymer MESH electrode integrated into fluidic channel for gate type sensor. / Yamamoto, Kensaku; Naka, Keisuke; Nagaura, Yasuhiro; Sato, Hironobu; Shoji, Shuichi; Konishi, Satoshi.

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2007. p. 271-274 4432966.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Yamamoto, K, Naka, K, Nagaura, Y, Sato, H, Shoji, S & Konishi, S 2007, Pyrolyzed polymer MESH electrode integrated into fluidic channel for gate type sensor. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 4432966, pp. 271-274, 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, Kobe, 07/1/21.
    Yamamoto K, Naka K, Nagaura Y, Sato H, Shoji S, Konishi S. Pyrolyzed polymer MESH electrode integrated into fluidic channel for gate type sensor. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2007. p. 271-274. 4432966
    Yamamoto, Kensaku ; Naka, Keisuke ; Nagaura, Yasuhiro ; Sato, Hironobu ; Shoji, Shuichi ; Konishi, Satoshi. / Pyrolyzed polymer MESH electrode integrated into fluidic channel for gate type sensor. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2007. pp. 271-274
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