PZT-based high coupling with low permittivity thin films

Kiyotaka Wasa, Tomoaki Matsushima, Hideaki Adachi, Toshifumi Matsunaga, Masashi Suzuki, Takahiko Yanagitani, Takashi Yamamoto, Shinya Yoshida, Shuji Tanaka, S. Trolier-Mckinstry

Research output: Contribution to conferencePaper

Abstract

PZT-based piezoelectric thin films will make better piezoelectric devices including piezoelectric energy harvesting (EH) power MEMS, when the piezoelectric thin films show high electromechanical coupling and/or high piezoelectric constants with low permittivity. The piezoelectric thin films are mostly polycrystalline structure with high piezoelectric constants and high dielectric constants, i.e. ε*=300-1300 and e31,f = -8 ∼ - 12C/m2. Recently we have found thin films of single c-domain/single crystal PZT-based ternary perovskite, Pb(Mn,Nb)-PZT, exhibit exotic properties, i.e. high coupling and/or high piezoelectric constants with low dielectric constants opposed to the PZT-based thin films. The relative dielectric constants are as low as 100 with e31,f = -12 C/m 2. The low dielectric constants achieve high values of Figures of Merit for the EH-MEMS. This paper will discuss on the origin of the exotic dielectric and piezoelectric properties of the single c-domain/single crystal thin films in comparison with bulk PZT-based ceramics.

Original languageEnglish
Pages69-72
Number of pages4
DOIs
Publication statusPublished - 2013 Jan 1
Externally publishedYes
Event2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013 - Prague 4, Czech Republic
Duration: 2013 Jul 212013 Jul 25

Other

Other2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013
CountryCzech Republic
CityPrague 4
Period13/7/2113/7/25

Keywords

  • PZT-based thin films
  • single crystal thin films
  • thin film piezoelectric Power MEMS

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Wasa, K., Matsushima, T., Adachi, H., Matsunaga, T., Suzuki, M., Yanagitani, T., Yamamoto, T., Yoshida, S., Tanaka, S., & Trolier-Mckinstry, S. (2013). PZT-based high coupling with low permittivity thin films. 69-72. Paper presented at 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013, Prague 4, Czech Republic. https://doi.org/10.1109/ISAF.2013.6748700