PZT Epitaxial Thick Film for Ultrasonic Transducer at Frequencies below 100 MHz

Yuka Mazda, Takahiro Shimidzu, Takahiko Yanagitani

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    The frequency range of 20-100 MHz ultrasonics are promising for photoacoustic imaging, which is useful to observe blood in vivo at high resolution. However, PVDF, which is generally used for transducers in this range does not exhibit high piezoelectricity (electromechanical coUpiing coefficient \pmb{k}-{\mathbf{t}^{2}}=4\%). On the other hand, our group previously reported high \pmb{k}-{\mathbf{t}}^{2} of the PZT family epitaxial thin films above 100 MHz (28.1% for PTO and 17.6% for PZT). In order to achieve lower frequency operation, thicker film is one of the approaches. In this study, we report sputter PZT epitaxial thicker film (16.0 \boldsymbol{\mu} \mathbf{m}) high efficient (\pmb{k}-{\mathbf{t}}^{2}=26.0\%) transducer whose thickness extensional mode resonant frequency is 89 MHz.

    Original languageEnglish
    Title of host publication2018 IEEE International Ultrasonics Symposium, IUS 2018
    PublisherIEEE Computer Society
    Volume2018-October
    ISBN (Electronic)9781538634257
    DOIs
    Publication statusPublished - 2018 Dec 17
    Event2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan
    Duration: 2018 Oct 222018 Oct 25

    Other

    Other2018 IEEE International Ultrasonics Symposium, IUS 2018
    CountryJapan
    CityKobe
    Period18/10/2218/10/25

    Keywords

    • Epitaxial PZT film
    • Thick film
    • Ultrasonic transducers

    ASJC Scopus subject areas

    • Acoustics and Ultrasonics

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  • Cite this

    Mazda, Y., Shimidzu, T., & Yanagitani, T. (2018). PZT Epitaxial Thick Film for Ultrasonic Transducer at Frequencies below 100 MHz. In 2018 IEEE International Ultrasonics Symposium, IUS 2018 (Vol. 2018-October). [8580215] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2018.8580215