Quantitative analysis of the effect of energetic particle bombardment during deposition on (1120) texture formation in ZnO films

Shinji Takayanagi, Takahiko Yanagitani, Mami Matsukawa, Yoshiaki Watanabe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

c-axis parallel-oriented (1120) ZnO films are suitable for shear mode devices. In previous studies, we pointed out that (1120) texture formation was induced by the ion bombardment during a planer RF magnetron sputtering deposition. However, quantitative information of the relationship between ion energy and amount of ion irradiation are not clear. In this study, we investigated the effects of energetic ion bombardment during sputtering deposition on (1120) texture formation. The distribution of crystalline orientation of the films on the anode plane was compared with the distribution of the amount of ion flux in the anode plane. Highly crystallized (1120) orientation appeared above the target erosion area where highly energetic O -l ions bombardment was observed under the low gas pressure condition. This information will give us how to obtain much better (1120) textured ZnO films for share mode devices.

Original languageEnglish
Title of host publication2011 IEEE International Ultrasonics Symposium, IUS 2011
Pages2317-2320
Number of pages4
DOIs
Publication statusPublished - 2011 Dec 1
Externally publishedYes
Event2011 IEEE International Ultrasonics Symposium, IUS 2011 - Orlando, FL, United States
Duration: 2011 Oct 182011 Oct 21

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2011 IEEE International Ultrasonics Symposium, IUS 2011
CountryUnited States
CityOrlando, FL
Period11/10/1811/10/21

Keywords

  • RF magnetron sputtering
  • ion bombardment
  • ion energy distribution
  • piezoelectric film
  • shear mode device

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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    Takayanagi, S., Yanagitani, T., Matsukawa, M., & Watanabe, Y. (2011). Quantitative analysis of the effect of energetic particle bombardment during deposition on (1120) texture formation in ZnO films. In 2011 IEEE International Ultrasonics Symposium, IUS 2011 (pp. 2317-2320). [6293444] (IEEE International Ultrasonics Symposium, IUS). https://doi.org/10.1109/ULTSYM.2011.0575