Quantitative backscattered electron imaging of field emission scanning electron microscopy for discrimination of nano-scale elements with nm-order spatial resolution

Hyonchol Kim, Tsutomu Negishi, Masato Kudo, Hiroyuki Takei, Kenji Yasuda*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

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