QUARTZ CRYSTAL MICROMECHANICAL DEVICES.

Toshitsugu Ueda, Fusao Kohsaka, Daisuke Yamazaki, Toshio Iino

Research output: Chapter in Book/Report/Conference proceedingConference contribution

18 Citations (Scopus)

Abstract

The authors are developing several kinds of micromechanical devices (MMD) made from quartz crystal using photolithography and anisotropic etching. A description is given of the mechanical and chemical properties of the quartz crystal used in MMDs, and the mirror galvanometer movement and pressure transducer which use such devices.

Original languageEnglish
Title of host publicationUnknown Host Publication Title
Place of PublicationNew York, NY, USA
PublisherIEEE
Pages113-116
Number of pages4
Publication statusPublished - 1985
Externally publishedYes

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Ueda, T., Kohsaka, F., Yamazaki, D., & Iino, T. (1985). QUARTZ CRYSTAL MICROMECHANICAL DEVICES. In Unknown Host Publication Title (pp. 113-116). IEEE.