Raman microscopy and scanning surface potential microscopy analysis of nanoscale defects on si wafer surfaces

Takayuki Homma, Masahiro Kato, Nobuhiro Kubo, Kaoruho Sakata, Masahiro Yanagisawa

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

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Chemical Compounds

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Physics & Astronomy