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Dive into the research topics of 'Raman microscopy and scanning surface potential microscopy analysis of nanoscale defects on si wafer surfaces'. Together they form a unique fingerprint.
Chemical Compounds
Surface potential
Microscopic examination
Scanning
Defects
Indentation
Silicon
Nanoindentation
Tensile stress
Plastic deformation
Chemical reactivity
Raman scattering
Tensile strain
Elastic deformation
Residual stresses
Direction compound
Cracks
Engineering & Materials Science
Surface potential
Microscopic examination
Scanning
Defects
Indentation
Nanoindentation
Tensile stress
Plastic deformation
Silicon
Chemical reactivity
Raman scattering
Tensile strain
Elastic deformation
Residual stresses
Cracks
Physics & Astronomy
wafers
microscopy
scanning
defects
indentation
shift
tensile stress
nanoindentation
plastic deformation
insulators
elastic deformation
silicon
reactivity
residual stress
cracks
Raman spectra
augmentation
causes