Abstract
We present the use of Raman spectroscopy as a rapid and convenient evaluation tool for domain distribution of tetragonal PbZrxTi 1-xO3 (PZT) thin films. From polarized Raman analyses of epitaxial PZT thin films with various c-domain volumes, we found that the intensity of the A1(TO) modes linearly scales with the c-domain volume. These observations, as well as the quick and nondestructive characteristics of this technique, clearly imply that Raman spectroscopy has enormous potential to quantify the fraction of c-domain volumes in a wide range of PZT devices.
Original language | English |
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Journal | Japanese Journal of Applied Physics, Part 2: Letters |
Volume | 44 |
Issue number | 24-27 |
DOIs | |
Publication status | Published - 2005 Jun 24 |
Externally published | Yes |
Keywords
- Domain distribution
- Pbzrtio (pzt)
- Raman scattering
- Thin film
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)