Raman spectroscopic characterization of tetragonal PbZrxTi 1-xO3 thin films: A rapid evaluation method for c-domain volume

Ken Nishida, Minoru Osada, Syunshuke Wada, Shoji Okamoto, Risako Ueno, Hiroshi Funakubo, Takashi Katoda

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

We present the use of Raman spectroscopy as a rapid and convenient evaluation tool for domain distribution of tetragonal PbZrxTi 1-xO3 (PZT) thin films. From polarized Raman analyses of epitaxial PZT thin films with various c-domain volumes, we found that the intensity of the A1(TO) modes linearly scales with the c-domain volume. These observations, as well as the quick and nondestructive characteristics of this technique, clearly imply that Raman spectroscopy has enormous potential to quantify the fraction of c-domain volumes in a wide range of PZT devices.

Original languageEnglish
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume44
Issue number24-27
DOIs
Publication statusPublished - 2005 Jun 24
Externally publishedYes

Keywords

  • Domain distribution
  • Pbzrtio (pzt)
  • Raman scattering
  • Thin film

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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