Raman spectroscopic characterization of tetragonal PbZrxTi 1-xO3 thin films

A rapid evaluation method for c-domain volume

Ken Nishida, Minoru Osada, Syunshuke Wada, Shoji Okamoto, Risako Ueno, Hiroshi Funakubo, Takashi Katoda

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

We present the use of Raman spectroscopy as a rapid and convenient evaluation tool for domain distribution of tetragonal PbZrxTi 1-xO3 (PZT) thin films. From polarized Raman analyses of epitaxial PZT thin films with various c-domain volumes, we found that the intensity of the A1(TO) modes linearly scales with the c-domain volume. These observations, as well as the quick and nondestructive characteristics of this technique, clearly imply that Raman spectroscopy has enormous potential to quantify the fraction of c-domain volumes in a wide range of PZT devices.

Original languageEnglish
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume44
Issue number24-27
DOIs
Publication statusPublished - 2005 Jun 24
Externally publishedYes

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Raman spectroscopy
Thin films
evaluation
thin films

Keywords

  • Domain distribution
  • Pbzrtio (pzt)
  • Raman scattering
  • Thin film

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Raman spectroscopic characterization of tetragonal PbZrxTi 1-xO3 thin films : A rapid evaluation method for c-domain volume. / Nishida, Ken; Osada, Minoru; Wada, Syunshuke; Okamoto, Shoji; Ueno, Risako; Funakubo, Hiroshi; Katoda, Takashi.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 44, No. 24-27, 24.06.2005.

Research output: Contribution to journalArticle

Nishida, Ken ; Osada, Minoru ; Wada, Syunshuke ; Okamoto, Shoji ; Ueno, Risako ; Funakubo, Hiroshi ; Katoda, Takashi. / Raman spectroscopic characterization of tetragonal PbZrxTi 1-xO3 thin films : A rapid evaluation method for c-domain volume. In: Japanese Journal of Applied Physics, Part 2: Letters. 2005 ; Vol. 44, No. 24-27.
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