Reduction of charging in surface analysis of insulating materials by AES

S. Ichimura; H. E. Bauer; H. Seiler; S. Hofmann

doi:10.1002/sia.740140507

Reduction of charging in surface analysis of insulating materials by AES

S. Ichimura, H. E. Bauer, H. Seiler, S. Hofmann

Research output: Contribution to journal › Article › peer-review

43 Citations (Scopus)

Abstract

Practical methods are investigated to reduce the charging which is often observed during AES analysis of insulating samples with keV electrons. It is shown that the negative charge caused by electron beams with keV energy can be either avoided or considerably reduced by the use of an additional electron beam or by the supply of low‐energy (500 eV) positive ions. It is also reported and discussed that the state of reduced or vanishing charging obtained by both methods can be maintained for long periods of time.

Original language	English
Pages (from-to)	250-256
Number of pages	7
Journal	Surface and Interface Analysis
Volume	14
Issue number	5
DOIs	https://doi.org/10.1002/sia.740140507
Publication status	Published - 1989 May
Externally published	Yes

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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