Reduction of pinhole leakage current of srtio 3 filins by arf excimer laser deposition with shadow mask (“eclipse method”)

Mamoru Iwabuchi, Kazuya Kinoshita, Hiroshige Ishibashi, Takeshi Kobayashi

Research output: Contribution to journalArticle

34 Citations (Scopus)

Abstract

An innovative technique using a shadow mask placed between the target and the substrate to reduce particles and/or droplets unique to excimer laser deposition was proposed. In the simple technique tentatively called the “eclipse method”, the deposition process proceeds with ablated species which are diffused with the assistance of the ambient gas. Even when we used pressed-powder targets, mirror like SrTiO 3 films deposited by the method showed large improvement in the primitive but intrinsic problem of leakage current due to many pinholes. In addition, the dielectric properties were examined from the electrical point of view.

Original languageEnglish
Pages (from-to)L610-L612
JournalJapanese journal of applied physics
Volume33
Issue number4
DOIs
Publication statusPublished - 1994 Apr
Externally publishedYes

Fingerprint

laser deposition
Excimer lasers
eclipses
pinholes
Leakage currents
excimer lasers
Masks
leakage
masks
Dielectric properties
dielectric properties
Mirrors
mirrors
Powders
Substrates
Gases
gases

Keywords

  • Excimer laser
  • Ferroelectric
  • Leakage current
  • Oxide superconductor
  • Pinhole
  • Shadow mask

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Reduction of pinhole leakage current of srtio 3 filins by arf excimer laser deposition with shadow mask (“eclipse method”) . / Iwabuchi, Mamoru; Kinoshita, Kazuya; Ishibashi, Hiroshige; Kobayashi, Takeshi.

In: Japanese journal of applied physics, Vol. 33, No. 4, 04.1994, p. L610-L612.

Research output: Contribution to journalArticle

@article{328b6d20bbbd417a8e229832db1868d0,
title = "Reduction of pinhole leakage current of srtio 3 filins by arf excimer laser deposition with shadow mask (“eclipse method”)",
abstract = "An innovative technique using a shadow mask placed between the target and the substrate to reduce particles and/or droplets unique to excimer laser deposition was proposed. In the simple technique tentatively called the “eclipse method”, the deposition process proceeds with ablated species which are diffused with the assistance of the ambient gas. Even when we used pressed-powder targets, mirror like SrTiO 3 films deposited by the method showed large improvement in the primitive but intrinsic problem of leakage current due to many pinholes. In addition, the dielectric properties were examined from the electrical point of view.",
keywords = "Excimer laser, Ferroelectric, Leakage current, Oxide superconductor, Pinhole, Shadow mask",
author = "Mamoru Iwabuchi and Kazuya Kinoshita and Hiroshige Ishibashi and Takeshi Kobayashi",
year = "1994",
month = "4",
doi = "10.1143/JJAP.33.L610",
language = "English",
volume = "33",
pages = "L610--L612",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "4",

}

TY - JOUR

T1 - Reduction of pinhole leakage current of srtio 3 filins by arf excimer laser deposition with shadow mask (“eclipse method”)

AU - Iwabuchi, Mamoru

AU - Kinoshita, Kazuya

AU - Ishibashi, Hiroshige

AU - Kobayashi, Takeshi

PY - 1994/4

Y1 - 1994/4

N2 - An innovative technique using a shadow mask placed between the target and the substrate to reduce particles and/or droplets unique to excimer laser deposition was proposed. In the simple technique tentatively called the “eclipse method”, the deposition process proceeds with ablated species which are diffused with the assistance of the ambient gas. Even when we used pressed-powder targets, mirror like SrTiO 3 films deposited by the method showed large improvement in the primitive but intrinsic problem of leakage current due to many pinholes. In addition, the dielectric properties were examined from the electrical point of view.

AB - An innovative technique using a shadow mask placed between the target and the substrate to reduce particles and/or droplets unique to excimer laser deposition was proposed. In the simple technique tentatively called the “eclipse method”, the deposition process proceeds with ablated species which are diffused with the assistance of the ambient gas. Even when we used pressed-powder targets, mirror like SrTiO 3 films deposited by the method showed large improvement in the primitive but intrinsic problem of leakage current due to many pinholes. In addition, the dielectric properties were examined from the electrical point of view.

KW - Excimer laser

KW - Ferroelectric

KW - Leakage current

KW - Oxide superconductor

KW - Pinhole

KW - Shadow mask

UR - http://www.scopus.com/inward/record.url?scp=0028421717&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0028421717&partnerID=8YFLogxK

U2 - 10.1143/JJAP.33.L610

DO - 10.1143/JJAP.33.L610

M3 - Article

AN - SCOPUS:0028421717

VL - 33

SP - L610-L612

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 4

ER -