Reflection electron microscope and scanning tunneling microscope observations of CVD diamond (001) surfaces

H. Sasaki, M. Aoki, H. Kawarada

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)

Abstract

Reflection electron microscopy (REM) and scanning tunneling microscopy have been applied to the estimation of the surface flatness of diamond (001) surfaces and to the 2 × 1 reconstructed structure. The macroscopic surface flatness observed by REM has been improved by using CO as a source gas and by boron-doping.

Original languageEnglish
Pages (from-to)1271-1276
Number of pages6
JournalDiamond and Related Materials
Volume2
Issue number9
DOIs
Publication statusPublished - 1993 Jul 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

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