Reflection electron microscope and scanning tunneling microscope observations of CVD diamond (001) surfaces

H. Sasaki, M. Aoki, H. Kawarada

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

Reflection electron microscopy (REM) and scanning tunneling microscopy have been applied to the estimation of the surface flatness of diamond (001) surfaces and to the 2 × 1 reconstructed structure. The macroscopic surface flatness observed by REM has been improved by using CO as a source gas and by boron-doping.

Original languageEnglish
Pages (from-to)1271-1276
Number of pages6
JournalDiamond and Related Materials
Volume2
Issue number9
DOIs
Publication statusPublished - 1993 Jul 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

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