Reflection electron microscope and scanning tunneling microscope observations of CVD diamond (001) surfaces

H. Sasaki, M. Aoki, Hiroshi Kawarada

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    21 Citations (Scopus)

    Abstract

    Reflection electron microscopy (REM) and scanning tunneling microscopy have been applied to the estimation of the surface flatness of diamond (001) surfaces and to the 2 × 1 reconstructed structure. The macroscopic surface flatness observed by REM has been improved by using CO as a source gas and by boron-doping.

    Original languageEnglish
    Pages (from-to)1271-1276
    Number of pages6
    JournalDiamond and Related Materials
    Volume2
    Issue number9
    DOIs
    Publication statusPublished - 1993 Jul 1

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    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Materials Chemistry
    • Surfaces, Coatings and Films
    • Surfaces and Interfaces

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