Relationship between tribological properties and sp 3/sp 2 structure of nitrogenated diamond-like carbon deposited by plasma CVD

Shuji Yamamoto, Atsuo Kawana, Hiroshi Ichimura, Chitoshi Masuda

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

The correlation between the wear resistance and the chemical states of the elements of nitrogenated diamond-like carbon (NDLC) is characterized and discussed in this paper. NDLCs have been deposited on tungsten-carbide, silicon and glass substrates by radio frequency plasma chemical vapor deposition (rf PCVD) from benzene (C 6H 6)-nitrogen mixtures with four different ratios. The nitrogen concentration in the films measured by electron microprobe analysis was found to be proportional to the nitrogen flow rate. The friction coefficients of the films determined by the ball-on-disk test increased with adding nitrogen contents. Such friction coefficient dependent on load was not observed in each film. The DLC showed adhesive wear. However, the wear mode of NDLCs changed from the adhesive wear to the abrasive wear at the critical load point. The film hardness measured by nano indentation decreased with increasing nitrogen. The sp 3/sp 2 measured by X-ray photoelectron spectroscopy (XPS) was reduced by adding nitrogen and as a result, the tribological behaviors such as the hardness, the wear resistance and the critical point were also decreased.

Original languageEnglish
Pages (from-to)1-9
Number of pages9
JournalSurface and Coatings Technology
Volume210
DOIs
Publication statusPublished - 2012 Oct 15

Fingerprint

Plasma CVD
Diamond
Diamonds
Nitrogen
Carbon
diamonds
vapor deposition
nitrogen
carbon
Wear of materials
wear resistance
coefficient of friction
adhesives
Wear resistance
Adhesives
hardness
Hardness
Friction
tungsten carbides
Tungsten carbide

Keywords

  • Abrasive wear
  • Adhesive wear
  • Hardness
  • Nitrogenated DLC
  • Sp
  • Sp

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Relationship between tribological properties and sp 3/sp 2 structure of nitrogenated diamond-like carbon deposited by plasma CVD. / Yamamoto, Shuji; Kawana, Atsuo; Ichimura, Hiroshi; Masuda, Chitoshi.

In: Surface and Coatings Technology, Vol. 210, 15.10.2012, p. 1-9.

Research output: Contribution to journalArticle

Yamamoto, Shuji ; Kawana, Atsuo ; Ichimura, Hiroshi ; Masuda, Chitoshi. / Relationship between tribological properties and sp 3/sp 2 structure of nitrogenated diamond-like carbon deposited by plasma CVD. In: Surface and Coatings Technology. 2012 ; Vol. 210. pp. 1-9.
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