RELIABILITY OF NANO-METER THICK MULTI-LAYER DIELECTRIC FILMS ON POLY-CRYSTALLINE SILICON.

Y. Ohji, T. Kusaka, I. Yoshida, A. Hiraiwa, K. Yagi, K. Mukai, O. Kasahara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

38 Citations (Scopus)

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Engineering & Materials Science