Resonance Properties of Leaky SAW Harmonics on Bonded Dissimilar-Material Structures

Shiori Asakawa, Masashi Suzuki, Shoji Kakio, Ami Tezuka, Jun Mizuno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The propagation and resonance properties of leaky surface acoustic wave (LSAW) harmonics of a bonded dissimilar-material structure, such as LiTaO3(LT)/quartz and LiNbO3 (LN)/quartz, were investigated theoretically and experimentally. Using a finite element method, when the metallization ratio of the interdigital transducer a/p was set to be 0.8, the fractional bandwidth for the third harmonic on 36°Y-cut X-propagating LT (36°YX-LT)/AT-cut 90°X-propagating quartz (AT90°X-quartz) with normalized film thickness h/lambda=0.06 (lambda: wavelength) and 27°YX-LN/AT90°X-quartz with h/lambda=0.1 were simulated to be 1.6% and 3.5%, respectively, which were larger than those of the single LT and LN. For an LSAW resonator with a/p=0.8 fabricated on 36°YX-LT/AT0°X-quartz, the measured fractional bandwidth, admittance ratio, and resonance Q factor increased to 1.4%, 63 dB, and 1, 770 from 0.8%, 31 dB, and 480 for the single LT, respectively. The h/lambda dependence of the measured temperature coefficient of frequency for the resonance frequency on 36°YX-LT/AT0°X-quartz was in good agreement with the calculated value.

Original languageEnglish
Title of host publicationIUS 2020 - International Ultrasonics Symposium, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781728154480
DOIs
Publication statusPublished - 2020 Sep 7
Event2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States
Duration: 2020 Sep 72020 Sep 11

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2020-September
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2020 IEEE International Ultrasonics Symposium, IUS 2020
Country/TerritoryUnited States
CityLas Vegas
Period20/9/720/9/11

Keywords

  • Bonded structure
  • Harmonics
  • Leaky SAW
  • Quartz

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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