TY - GEN
T1 - Resonance Properties of Leaky SAW Harmonics on Bonded Dissimilar-Material Structures
AU - Asakawa, Shiori
AU - Suzuki, Masashi
AU - Kakio, Shoji
AU - Tezuka, Ami
AU - Mizuno, Jun
N1 - Funding Information:
ACKNOWLEDGMENTS This work was supported by JSPS Grant-in-Aid for Scientific Research (B) no. 17H03233 and 20H02181.
Publisher Copyright:
© 2020 IEEE.
PY - 2020/9/7
Y1 - 2020/9/7
N2 - The propagation and resonance properties of leaky surface acoustic wave (LSAW) harmonics of a bonded dissimilar-material structure, such as LiTaO3(LT)/quartz and LiNbO3 (LN)/quartz, were investigated theoretically and experimentally. Using a finite element method, when the metallization ratio of the interdigital transducer a/p was set to be 0.8, the fractional bandwidth for the third harmonic on 36°Y-cut X-propagating LT (36°YX-LT)/AT-cut 90°X-propagating quartz (AT90°X-quartz) with normalized film thickness h/lambda=0.06 (lambda: wavelength) and 27°YX-LN/AT90°X-quartz with h/lambda=0.1 were simulated to be 1.6% and 3.5%, respectively, which were larger than those of the single LT and LN. For an LSAW resonator with a/p=0.8 fabricated on 36°YX-LT/AT0°X-quartz, the measured fractional bandwidth, admittance ratio, and resonance Q factor increased to 1.4%, 63 dB, and 1, 770 from 0.8%, 31 dB, and 480 for the single LT, respectively. The h/lambda dependence of the measured temperature coefficient of frequency for the resonance frequency on 36°YX-LT/AT0°X-quartz was in good agreement with the calculated value.
AB - The propagation and resonance properties of leaky surface acoustic wave (LSAW) harmonics of a bonded dissimilar-material structure, such as LiTaO3(LT)/quartz and LiNbO3 (LN)/quartz, were investigated theoretically and experimentally. Using a finite element method, when the metallization ratio of the interdigital transducer a/p was set to be 0.8, the fractional bandwidth for the third harmonic on 36°Y-cut X-propagating LT (36°YX-LT)/AT-cut 90°X-propagating quartz (AT90°X-quartz) with normalized film thickness h/lambda=0.06 (lambda: wavelength) and 27°YX-LN/AT90°X-quartz with h/lambda=0.1 were simulated to be 1.6% and 3.5%, respectively, which were larger than those of the single LT and LN. For an LSAW resonator with a/p=0.8 fabricated on 36°YX-LT/AT0°X-quartz, the measured fractional bandwidth, admittance ratio, and resonance Q factor increased to 1.4%, 63 dB, and 1, 770 from 0.8%, 31 dB, and 480 for the single LT, respectively. The h/lambda dependence of the measured temperature coefficient of frequency for the resonance frequency on 36°YX-LT/AT0°X-quartz was in good agreement with the calculated value.
KW - Bonded structure
KW - Harmonics
KW - Leaky SAW
KW - Quartz
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U2 - 10.1109/IUS46767.2020.9251535
DO - 10.1109/IUS46767.2020.9251535
M3 - Conference contribution
AN - SCOPUS:85097867790
T3 - IEEE International Ultrasonics Symposium, IUS
BT - IUS 2020 - International Ultrasonics Symposium, Proceedings
PB - IEEE Computer Society
T2 - 2020 IEEE International Ultrasonics Symposium, IUS 2020
Y2 - 7 September 2020 through 11 September 2020
ER -