Abstract
Size-induced suppression of permittivity in perovskite thin films is a fundamental problem that has remained unresolved for decades. This size-effect issue becomes increasingly important due to the integration of perovskite nanofilms into high-κ capacitors, as well as concerns that intrinsic size effects may limit their device performance. Here, we report a new approach to produce robust high-κ nanodielectrics using perovskite nanosheet (Ca 2Nb3O10), a new class of nanomaterials that is derived from layered compounds by exfoliation. By a solution-based bottom-up approach using perovskite nanosheets, we have successfully fabricated multilayer nanofilms directly on SrRuO3 or Pt substrates without any interfacial dead layers. These nanofilms exhibit high dielectric constant (>200), the largest value seen so far in perovskite films with a thickness down to 10 nm. Furthermore, the superior high-κ properties are a size-effect-free characteristic with low leakage current density (<10 -7 A cm-2). Our work provides a key for understanding the size effect and also represents a step toward a bottom-up paradigm for future high-κ devices.
| Original language | English |
|---|---|
| Pages (from-to) | 5225-5232 |
| Number of pages | 8 |
| Journal | ACS Nano |
| Volume | 4 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - 2010 Sep 28 |
| Externally published | Yes |
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Keywords
- high-κdielectrics
- layer-by-layer assembly
- perovskite nanosheets
- size effect
ASJC Scopus subject areas
- Engineering(all)
- Materials Science(all)
- Physics and Astronomy(all)
Cite this
Robust high-κ response in molecularly thin perovskite nanosheets. / Osada, Minoru; Akatsuka, Kosho; Ebina, Yasuo; Funakubo, Hiroshi; Ono, Kanta; Takada, Kazunori; Sasaki, Takayoshi.
In: ACS Nano, Vol. 4, No. 9, 28.09.2010, p. 5225-5232.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Robust high-κ response in molecularly thin perovskite nanosheets
AU - Osada, Minoru
AU - Akatsuka, Kosho
AU - Ebina, Yasuo
AU - Funakubo, Hiroshi
AU - Ono, Kanta
AU - Takada, Kazunori
AU - Sasaki, Takayoshi
PY - 2010/9/28
Y1 - 2010/9/28
N2 - Size-induced suppression of permittivity in perovskite thin films is a fundamental problem that has remained unresolved for decades. This size-effect issue becomes increasingly important due to the integration of perovskite nanofilms into high-κ capacitors, as well as concerns that intrinsic size effects may limit their device performance. Here, we report a new approach to produce robust high-κ nanodielectrics using perovskite nanosheet (Ca 2Nb3O10), a new class of nanomaterials that is derived from layered compounds by exfoliation. By a solution-based bottom-up approach using perovskite nanosheets, we have successfully fabricated multilayer nanofilms directly on SrRuO3 or Pt substrates without any interfacial dead layers. These nanofilms exhibit high dielectric constant (>200), the largest value seen so far in perovskite films with a thickness down to 10 nm. Furthermore, the superior high-κ properties are a size-effect-free characteristic with low leakage current density (<10 -7 A cm-2). Our work provides a key for understanding the size effect and also represents a step toward a bottom-up paradigm for future high-κ devices.
AB - Size-induced suppression of permittivity in perovskite thin films is a fundamental problem that has remained unresolved for decades. This size-effect issue becomes increasingly important due to the integration of perovskite nanofilms into high-κ capacitors, as well as concerns that intrinsic size effects may limit their device performance. Here, we report a new approach to produce robust high-κ nanodielectrics using perovskite nanosheet (Ca 2Nb3O10), a new class of nanomaterials that is derived from layered compounds by exfoliation. By a solution-based bottom-up approach using perovskite nanosheets, we have successfully fabricated multilayer nanofilms directly on SrRuO3 or Pt substrates without any interfacial dead layers. These nanofilms exhibit high dielectric constant (>200), the largest value seen so far in perovskite films with a thickness down to 10 nm. Furthermore, the superior high-κ properties are a size-effect-free characteristic with low leakage current density (<10 -7 A cm-2). Our work provides a key for understanding the size effect and also represents a step toward a bottom-up paradigm for future high-κ devices.
KW - high-κdielectrics
KW - layer-by-layer assembly
KW - perovskite nanosheets
KW - size effect
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U2 - 10.1021/nn101453v
DO - 10.1021/nn101453v
M3 - Article
VL - 4
SP - 5225
EP - 5232
JO - ACS Nano
JF - ACS Nano
SN - 1936-0851
IS - 9
ER -