Room-temperature transfer bonding of lithium niobate thin film on micromachined silicon substrate with Au microbumps

Ryo Takigawa*, Eiji Higurashi, Tadatomo Suga, Tetsuya Kawanishi

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)

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Engineering & Materials Science

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Chemical Compounds