ScAlN Free-Standing 0.1 mm Plates with 30-50 MHz Resonance Frequency

Chiaki Masamune, Rei Karasawal, Takahiko Yanagitani

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    Ultrasonic transducer is used for biological imaging. High frequency ultrasound has high spatial resolution. Higher frequency, however, induces lower deep resolution because of the large sound attenuation. The electromechanical coupling coefficient kt2 of generally used PVDF (Polyvinylidene Difluoride) is not enough for practical applications. We previously reported the transducer with ScAlN thick film on silica glass rod, operating at 44 MHz (kt2=11.9%) [1]. Lead-free ScAlN with large piezoelectricity is suitable for medical applications. In this study, we report for the first time the fabrication of ScAlN free-standing plates with 0.105 mm and 0.117 mm thickness by using hot target sputtering growth.

    Original languageEnglish
    Title of host publication2018 IEEE International Ultrasonics Symposium, IUS 2018
    PublisherIEEE Computer Society
    Volume2018-October
    ISBN (Electronic)9781538634257
    DOIs
    Publication statusPublished - 2018 Dec 17
    Event2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan
    Duration: 2018 Oct 222018 Oct 25

    Other

    Other2018 IEEE International Ultrasonics Symposium, IUS 2018
    CountryJapan
    CityKobe
    Period18/10/2218/10/25

    Keywords

    • free-standing plate
    • pieozoelectric plate
    • ScAlN

    ASJC Scopus subject areas

    • Acoustics and Ultrasonics

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  • Cite this

    Masamune, C., Karasawal, R., & Yanagitani, T. (2018). ScAlN Free-Standing 0.1 mm Plates with 30-50 MHz Resonance Frequency. In 2018 IEEE International Ultrasonics Symposium, IUS 2018 (Vol. 2018-October). [8579797] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2018.8579797