ScAlN Free-Standing 0.1 mm Plates with 30-50 MHz Resonance Frequency

Chiaki Masamune, Rei Karasawal, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Ultrasonic transducer is used for biological imaging. High frequency ultrasound has high spatial resolution. Higher frequency, however, induces lower deep resolution because of the large sound attenuation. The electromechanical coupling coefficient kt2 of generally used PVDF (Polyvinylidene Difluoride) is not enough for practical applications. We previously reported the transducer with ScAlN thick film on silica glass rod, operating at 44 MHz (kt2=11.9%) [1]. Lead-free ScAlN with large piezoelectricity is suitable for medical applications. In this study, we report for the first time the fabrication of ScAlN free-standing plates with 0.105 mm and 0.117 mm thickness by using hot target sputtering growth.

Original languageEnglish
Title of host publication2018 IEEE International Ultrasonics Symposium, IUS 2018
PublisherIEEE Computer Society
ISBN (Electronic)9781538634257
DOIs
Publication statusPublished - 2018 Dec 17
Event2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan
Duration: 2018 Oct 222018 Oct 25

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2018-October
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2018 IEEE International Ultrasonics Symposium, IUS 2018
CountryJapan
CityKobe
Period18/10/2218/10/25

Keywords

  • ScAlN
  • free-standing plate
  • pieozoelectric plate

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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