ScAlN nano-rods structure thin film grown by a self-shadowing oblique sputtering for high electromechanical coupling transducer applications

Takumi Soutome, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Electromechanical coupling k{mathrm{t}} for laterally clamped thin PZT plate is smaller than k{33} for the rod type PZT which is free from lateral clamping [1]. PZT rod and polymer composite plate transducer makes it possible to enhance the coupling near k{33} rather than k{mathrm{t}} because of lateral unclamping due to the soft polymer. In this study, we propose the ScAlN nano-rods transducers, which is free from lateral clamping to obtain k{33} mode operation rather than usual k{mathrm{t}} mode operation. In the oblique sputtering growth, porous nano- rods structure forms because the side of crystal grain shadows the opposite of the crystal grain (, which is so called self-shadowing effect) [2]. Using this effect, we aimed to obtain nano-rods structure with c-axis perpendicular to the substrate. We obtained desired perpendicular nano-rods structure by RF magnetron sputtering with substrate rotation. However, only a weak k{33}-{2} was observed because of low degrees of crystallization of ScAlN. This lead free flexible ScAlN nano-rods are expected to be substitute for PVDF polymers when the highly crystalline ScAlN film is achieved.

Original languageEnglish
Title of host publicationIUS 2020 - International Ultrasonics Symposium, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781728154480
DOIs
Publication statusPublished - 2020 Sep 7
Event2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States
Duration: 2020 Sep 72020 Sep 11

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2020-September
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2020 IEEE International Ultrasonics Symposium, IUS 2020
CountryUnited States
CityLas Vegas
Period20/9/720/9/11

Keywords

  • Oblique sputtering
  • ScAlN
  • Transducers

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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