Scanning micromirror using deformation of a parylene-encapsulated liquid structure

Yuta Yoshihata, Nguyen Binh-Khiem, Atsushi Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

This paper presents a scanning micromirror using deformation of a Parylene-Encapsulated Liquid Structure (PELS). Silicone fluid is put between a silicon plate and an electrode-patterned plate. Both of the plates and liquid are encapsulated by a Parylene membrane. Gold is deposited on the surface of the Parylene membrane to fabricate an upper electrode. By applying voltage between the upper and lower electrodes, the encapsulated liquid is deformed and the silicon plate is tilted. The silicon plate is supported by the PELS, instead of usual torsion beams. When a set of four appropriately synchronized voltages is applied between the four lower electrodes and the upper electrode, two dimensional scanning motion is achieved.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages770-773
Number of pages4
DOIs
Publication statusPublished - 2008
Externally publishedYes
Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ
Duration: 2008 Jan 132008 Jan 17

Other

Other21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
CityTucson, AZ
Period08/1/1308/1/17

Fingerprint

Scanning
Electrodes
Liquids
Silicon
Membranes
Electric potential
Silicones
Torsional stress
Gold
Fluids

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Yoshihata, Y., Binh-Khiem, N., Takei, A., Iwase, E., Matsumoto, K., & Shimoyama, I. (2008). Scanning micromirror using deformation of a parylene-encapsulated liquid structure. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 770-773). [4443770] https://doi.org/10.1109/MEMSYS.2008.4443770

Scanning micromirror using deformation of a parylene-encapsulated liquid structure. / Yoshihata, Yuta; Binh-Khiem, Nguyen; Takei, Atsushi; Iwase, Eiji; Matsumoto, Kiyoshi; Shimoyama, Isao.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2008. p. 770-773 4443770.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yoshihata, Y, Binh-Khiem, N, Takei, A, Iwase, E, Matsumoto, K & Shimoyama, I 2008, Scanning micromirror using deformation of a parylene-encapsulated liquid structure. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 4443770, pp. 770-773, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, Tucson, AZ, 08/1/13. https://doi.org/10.1109/MEMSYS.2008.4443770
Yoshihata Y, Binh-Khiem N, Takei A, Iwase E, Matsumoto K, Shimoyama I. Scanning micromirror using deformation of a parylene-encapsulated liquid structure. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2008. p. 770-773. 4443770 https://doi.org/10.1109/MEMSYS.2008.4443770
Yoshihata, Yuta ; Binh-Khiem, Nguyen ; Takei, Atsushi ; Iwase, Eiji ; Matsumoto, Kiyoshi ; Shimoyama, Isao. / Scanning micromirror using deformation of a parylene-encapsulated liquid structure. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2008. pp. 770-773
@inproceedings{c28e6eae150b4346af8989cac791c14f,
title = "Scanning micromirror using deformation of a parylene-encapsulated liquid structure",
abstract = "This paper presents a scanning micromirror using deformation of a Parylene-Encapsulated Liquid Structure (PELS). Silicone fluid is put between a silicon plate and an electrode-patterned plate. Both of the plates and liquid are encapsulated by a Parylene membrane. Gold is deposited on the surface of the Parylene membrane to fabricate an upper electrode. By applying voltage between the upper and lower electrodes, the encapsulated liquid is deformed and the silicon plate is tilted. The silicon plate is supported by the PELS, instead of usual torsion beams. When a set of four appropriately synchronized voltages is applied between the four lower electrodes and the upper electrode, two dimensional scanning motion is achieved.",
author = "Yuta Yoshihata and Nguyen Binh-Khiem and Atsushi Takei and Eiji Iwase and Kiyoshi Matsumoto and Isao Shimoyama",
year = "2008",
doi = "10.1109/MEMSYS.2008.4443770",
language = "English",
isbn = "9781424417933",
pages = "770--773",
booktitle = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

}

TY - GEN

T1 - Scanning micromirror using deformation of a parylene-encapsulated liquid structure

AU - Yoshihata, Yuta

AU - Binh-Khiem, Nguyen

AU - Takei, Atsushi

AU - Iwase, Eiji

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

PY - 2008

Y1 - 2008

N2 - This paper presents a scanning micromirror using deformation of a Parylene-Encapsulated Liquid Structure (PELS). Silicone fluid is put between a silicon plate and an electrode-patterned plate. Both of the plates and liquid are encapsulated by a Parylene membrane. Gold is deposited on the surface of the Parylene membrane to fabricate an upper electrode. By applying voltage between the upper and lower electrodes, the encapsulated liquid is deformed and the silicon plate is tilted. The silicon plate is supported by the PELS, instead of usual torsion beams. When a set of four appropriately synchronized voltages is applied between the four lower electrodes and the upper electrode, two dimensional scanning motion is achieved.

AB - This paper presents a scanning micromirror using deformation of a Parylene-Encapsulated Liquid Structure (PELS). Silicone fluid is put between a silicon plate and an electrode-patterned plate. Both of the plates and liquid are encapsulated by a Parylene membrane. Gold is deposited on the surface of the Parylene membrane to fabricate an upper electrode. By applying voltage between the upper and lower electrodes, the encapsulated liquid is deformed and the silicon plate is tilted. The silicon plate is supported by the PELS, instead of usual torsion beams. When a set of four appropriately synchronized voltages is applied between the four lower electrodes and the upper electrode, two dimensional scanning motion is achieved.

UR - http://www.scopus.com/inward/record.url?scp=50149118840&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=50149118840&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2008.4443770

DO - 10.1109/MEMSYS.2008.4443770

M3 - Conference contribution

SN - 9781424417933

SP - 770

EP - 773

BT - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ER -