Scanning micromirror using deformation of a parylene-encapsulated liquid structure

Yuta Yoshihata*, Nguyen Binh-Khiem, Atsushi Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

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Engineering & Materials Science

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Physics & Astronomy