Seamless pattern fabrication of large-area nanostructures using ultraviolet nanoimprint lithography

Shingo Kataza, Kentaro Ishibashi, Mitsunori Kokubo, Hiroshi Goto, Jun Mizuno, Shuichi Shoji

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy