Secondary ion mass spectrometry of organic thin films using metal-cluster-complex ion source

Yukio Fujiwara, Kouji Kondou, Hidehiko Nonaka, Naoaki Saito, Hiroshi Itoh, Toshiyuki Fujimoto, Akira Kurokawa, Shingo Ichimura, Mitsuhiro Tomita

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Tetrairidium dodecacarbonyl, Ir4(CO)12, is a metal cluster complex that has a molecular weight of 1104.9. Using a metal-cluster-complex ion source, secondary ion mass spectrometry (SIMS) of poly(methyl methacrylate) (PMMA) thin films on silicon substrates was performed with a quadrupole mass spectrometer. The secondary ion intensity of PMMA bombarded with Ir4(CO)7 + ions was investigated in the beam energy ranging from 3 to 10 keV at an incident angle of 45°. For comparison, bombardment with oxygen ions, O2 +, was also tested. It was confirmed that the use of Ir4(CO)7 + ions enhanced secondary ion intensity by at least one order of magnitude compared with that of O2 + ions. Experimental results also showed that secondary ion intensity increased with beam energy; particularly, high-mass secondary ion intensity markedly increased.

Original languageEnglish
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume45
Issue number33-36
DOIs
Publication statusPublished - 2006 Sep 8
Externally publishedYes

Fingerprint

Ion sources
metal clusters
Secondary ion mass spectrometry
ion sources
secondary ion mass spectrometry
Thin films
Ions
thin films
Metals
ions
polymethyl methacrylate
Polymethyl methacrylates
oxygen ions
Mass spectrometers
mass spectrometers
bombardment
molecular weight
quadrupoles
Molecular weight
energy

Keywords

  • Ion beam
  • Lr(CO)
  • Metal cluster complex
  • Organic film
  • PMMA
  • Poly(methyl methacrylate)
  • Polymer
  • SIMS
  • Sputtering

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

Secondary ion mass spectrometry of organic thin films using metal-cluster-complex ion source. / Fujiwara, Yukio; Kondou, Kouji; Nonaka, Hidehiko; Saito, Naoaki; Itoh, Hiroshi; Fujimoto, Toshiyuki; Kurokawa, Akira; Ichimura, Shingo; Tomita, Mitsuhiro.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 45, No. 33-36, 08.09.2006.

Research output: Contribution to journalArticle

Fujiwara, Yukio ; Kondou, Kouji ; Nonaka, Hidehiko ; Saito, Naoaki ; Itoh, Hiroshi ; Fujimoto, Toshiyuki ; Kurokawa, Akira ; Ichimura, Shingo ; Tomita, Mitsuhiro. / Secondary ion mass spectrometry of organic thin films using metal-cluster-complex ion source. In: Japanese Journal of Applied Physics, Part 2: Letters. 2006 ; Vol. 45, No. 33-36.
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abstract = "Tetrairidium dodecacarbonyl, Ir4(CO)12, is a metal cluster complex that has a molecular weight of 1104.9. Using a metal-cluster-complex ion source, secondary ion mass spectrometry (SIMS) of poly(methyl methacrylate) (PMMA) thin films on silicon substrates was performed with a quadrupole mass spectrometer. The secondary ion intensity of PMMA bombarded with Ir4(CO)7 + ions was investigated in the beam energy ranging from 3 to 10 keV at an incident angle of 45°. For comparison, bombardment with oxygen ions, O2 +, was also tested. It was confirmed that the use of Ir4(CO)7 + ions enhanced secondary ion intensity by at least one order of magnitude compared with that of O2 + ions. Experimental results also showed that secondary ion intensity increased with beam energy; particularly, high-mass secondary ion intensity markedly increased.",
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AU - Itoh, Hiroshi

AU - Fujimoto, Toshiyuki

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