Secondary ion mass spectrometry of organic thin films using metal-cluster-complex ion source

Yukio Fujiwara, Kouji Kondou, Hidehiko Nonaka, Naoaki Saito, Hiroshi Itoh, Toshiyuki Fujimoto, Akira Kurokawa, Shingo Ichimura, Mitsuhiro Tomita

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14 Citations (Scopus)

Abstract

Tetrairidium dodecacarbonyl, Ir4(CO)12, is a metal cluster complex that has a molecular weight of 1104.9. Using a metal-cluster-complex ion source, secondary ion mass spectrometry (SIMS) of poly(methyl methacrylate) (PMMA) thin films on silicon substrates was performed with a quadrupole mass spectrometer. The secondary ion intensity of PMMA bombarded with Ir4(CO)7+ ions was investigated in the beam energy ranging from 3 to 10 keV at an incident angle of 45°. For comparison, bombardment with oxygen ions, O2+, was also tested. It was confirmed that the use of Ir4(CO)7 + ions enhanced secondary ion intensity by at least one order of magnitude compared with that of O2+ ions. Experimental results also showed that secondary ion intensity increased with beam energy; particularly, high-mass secondary ion intensity markedly increased.

Original languageEnglish
Pages (from-to)L987-L990
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume45
Issue number33-36
DOIs
Publication statusPublished - 2006 Sep 8

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Keywords

  • Ion beam
  • Lr(CO)
  • Metal cluster complex
  • Organic film
  • PMMA
  • Poly(methyl methacrylate)
  • Polymer
  • SIMS
  • Sputtering

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

Fujiwara, Y., Kondou, K., Nonaka, H., Saito, N., Itoh, H., Fujimoto, T., Kurokawa, A., Ichimura, S., & Tomita, M. (2006). Secondary ion mass spectrometry of organic thin films using metal-cluster-complex ion source. Japanese Journal of Applied Physics, Part 2: Letters, 45(33-36), L987-L990. https://doi.org/10.1143/JJAP.45.L987