Abstract
A technique for the selective-area growth of GaAs on a nanometer scale is described. The technique comprises nitrogen (N)-passivation mask formation, scanning-tunneling-microscopy (STM) pattern modification, and metalorganic molecular-beam epitaxy. GaAs (001) surfaces are passivated with N radicals dissociated from N2 molecules and are modified by STM on a nanometer scale. GaAs nanostructures are then grown on the modified areas using trimethylgallium and tertiarybutylarsine. Uniform 6-nm-high and 50×50-nm2 dots were formed on 50×50-nm2 STM-modified areas. The advantage of the technique is that size-controlled nanostructures can be fabricated in specific positions and these nanostructures are free from contamination because all processes are performed in a vacuum.
Original language | English |
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Pages (from-to) | 1161-1163 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 70 |
Issue number | 9 |
DOIs | |
Publication status | Published - 1997 Mar 3 |
Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)