Self-aligned formation of nano-holes to arrayed micro glass tubes

Hirotaka Sato, Takuya Yamaguchi, Tetsuhiko Isobe, Takayuki Homma, Shuichi Shoji

    Research output: Contribution to journalArticle

    1 Citation (Scopus)

    Abstract

    Microreactors and micro-fluidic devices require micro-tube structures to reserve and manipulate extremely small volume of liquid specimen, and nano-hole on the micro-tube is useful for its injection, aspiration and filtration, etc. In the present study, we attempted to develop a precise etching process to form nano-hole to the edge part of the micro glass tube by controlling SiO2 etching conditions with diluted aqueous HF solution. The arrayed micro-glass-tubes were fabricated by electrochemical etching of Si wafer followed by wet-thermal oxidation. The bottoms of arrayed micro-glass-tubes were exposed from Si wafer, which possessed pyramid-shape edges. The etching with optimized concentration of HF formed uniform nano-holes only at every bottom edge, indicating self-alignment of the etching process. The diameter of the nano-holes was controllable in the range of ca. 100-500 nm by adjusting the immersion duration and thickness of the glass tube. Nonlinear diffusion of fluoride species to the bottom edges could be the origin of the self-aligned formation of nano-holes at the bottom edges.

    Original languageEnglish
    Pages (from-to)200-204
    Number of pages5
    JournalElectrochimica Acta
    Volume53
    Issue number1
    DOIs
    Publication statusPublished - 2007 Nov 20

    Fingerprint

    Etching
    Glass
    Fluidic devices
    Electrochemical etching
    Fluorides
    Oxidation
    Liquids

    Keywords

    • Arrayed microstructure
    • Etching
    • Maskless nanofabrication
    • Microreactor
    • Silicon micromachining

    ASJC Scopus subject areas

    • Chemical Engineering(all)
    • Analytical Chemistry
    • Electrochemistry

    Cite this

    Self-aligned formation of nano-holes to arrayed micro glass tubes. / Sato, Hirotaka; Yamaguchi, Takuya; Isobe, Tetsuhiko; Homma, Takayuki; Shoji, Shuichi.

    In: Electrochimica Acta, Vol. 53, No. 1, 20.11.2007, p. 200-204.

    Research output: Contribution to journalArticle

    Sato, Hirotaka ; Yamaguchi, Takuya ; Isobe, Tetsuhiko ; Homma, Takayuki ; Shoji, Shuichi. / Self-aligned formation of nano-holes to arrayed micro glass tubes. In: Electrochimica Acta. 2007 ; Vol. 53, No. 1. pp. 200-204.
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