Self-excited chopper made by quartz micromachining and its application to an optical sensor

Hiroshi Toshiyoshi, Hiroyuki Fujita, Toshitsugu Ueda

Research output: Chapter in Book/Report/Conference proceedingChapter

4 Citations (Scopus)

Abstract

We report the successful self-excited operation of the monolithic optical chopper made of quartz. The chopper is oscillated through piezoelectric strain induced by electric field between meandering electrodes on the flexible suspensions. The piezoelectric signal from the deformed suspension is detected to control the amplitude of oscillation at constant magnitude. We also employed this chopper in an optical sensor as a mechanical component to regulate the incident laser-beam, and demonstrated chopper-amplification and demodulation.

Original languageEnglish
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems
Place of PublicationPiscataway, NJ, United States
PublisherPubl by IEEE
Pages325-330
Number of pages6
ISBN (Print)078031834X
Publication statusPublished - 1994
Externally publishedYes
EventProceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn
Duration: 1994 Jan 251994 Jan 28

Other

OtherProceedings of the IEEE Micro Electro Mechanical Systems
CityOiso, Jpn
Period94/1/2594/1/28

Fingerprint

Micromachining
Optical sensors
Quartz
Demodulation
Laser beams
Amplification
Electric fields
Electrodes

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Engineering(all)

Cite this

Toshiyoshi, H., Fujita, H., & Ueda, T. (1994). Self-excited chopper made by quartz micromachining and its application to an optical sensor. In Proceedings of the IEEE Micro Electro Mechanical Systems (pp. 325-330). Piscataway, NJ, United States: Publ by IEEE.

Self-excited chopper made by quartz micromachining and its application to an optical sensor. / Toshiyoshi, Hiroshi; Fujita, Hiroyuki; Ueda, Toshitsugu.

Proceedings of the IEEE Micro Electro Mechanical Systems. Piscataway, NJ, United States : Publ by IEEE, 1994. p. 325-330.

Research output: Chapter in Book/Report/Conference proceedingChapter

Toshiyoshi, H, Fujita, H & Ueda, T 1994, Self-excited chopper made by quartz micromachining and its application to an optical sensor. in Proceedings of the IEEE Micro Electro Mechanical Systems. Publ by IEEE, Piscataway, NJ, United States, pp. 325-330, Proceedings of the IEEE Micro Electro Mechanical Systems, Oiso, Jpn, 94/1/25.
Toshiyoshi H, Fujita H, Ueda T. Self-excited chopper made by quartz micromachining and its application to an optical sensor. In Proceedings of the IEEE Micro Electro Mechanical Systems. Piscataway, NJ, United States: Publ by IEEE. 1994. p. 325-330
Toshiyoshi, Hiroshi ; Fujita, Hiroyuki ; Ueda, Toshitsugu. / Self-excited chopper made by quartz micromachining and its application to an optical sensor. Proceedings of the IEEE Micro Electro Mechanical Systems. Piscataway, NJ, United States : Publ by IEEE, 1994. pp. 325-330
@inbook{a5ac74e21bae4aae8bd3eff0be1776a9,
title = "Self-excited chopper made by quartz micromachining and its application to an optical sensor",
abstract = "We report the successful self-excited operation of the monolithic optical chopper made of quartz. The chopper is oscillated through piezoelectric strain induced by electric field between meandering electrodes on the flexible suspensions. The piezoelectric signal from the deformed suspension is detected to control the amplitude of oscillation at constant magnitude. We also employed this chopper in an optical sensor as a mechanical component to regulate the incident laser-beam, and demonstrated chopper-amplification and demodulation.",
author = "Hiroshi Toshiyoshi and Hiroyuki Fujita and Toshitsugu Ueda",
year = "1994",
language = "English",
isbn = "078031834X",
pages = "325--330",
booktitle = "Proceedings of the IEEE Micro Electro Mechanical Systems",
publisher = "Publ by IEEE",

}

TY - CHAP

T1 - Self-excited chopper made by quartz micromachining and its application to an optical sensor

AU - Toshiyoshi, Hiroshi

AU - Fujita, Hiroyuki

AU - Ueda, Toshitsugu

PY - 1994

Y1 - 1994

N2 - We report the successful self-excited operation of the monolithic optical chopper made of quartz. The chopper is oscillated through piezoelectric strain induced by electric field between meandering electrodes on the flexible suspensions. The piezoelectric signal from the deformed suspension is detected to control the amplitude of oscillation at constant magnitude. We also employed this chopper in an optical sensor as a mechanical component to regulate the incident laser-beam, and demonstrated chopper-amplification and demodulation.

AB - We report the successful self-excited operation of the monolithic optical chopper made of quartz. The chopper is oscillated through piezoelectric strain induced by electric field between meandering electrodes on the flexible suspensions. The piezoelectric signal from the deformed suspension is detected to control the amplitude of oscillation at constant magnitude. We also employed this chopper in an optical sensor as a mechanical component to regulate the incident laser-beam, and demonstrated chopper-amplification and demodulation.

UR - http://www.scopus.com/inward/record.url?scp=0028016823&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0028016823&partnerID=8YFLogxK

M3 - Chapter

AN - SCOPUS:0028016823

SN - 078031834X

SP - 325

EP - 330

BT - Proceedings of the IEEE Micro Electro Mechanical Systems

PB - Publ by IEEE

CY - Piscataway, NJ, United States

ER -