Self-excited chopper made by quartz micromachining and its application to an optical sensor

Hiroshi Toshiyoshi, Hiroyuki Fujita, Toshitsugu Ueda

Research output: Chapter in Book/Report/Conference proceedingChapter

5 Citations (Scopus)

Abstract

We report the successful self-excited operation of the monolithic optical chopper made of quartz. The chopper is oscillated through piezoelectric strain induced by electric field between meandering electrodes on the flexible suspensions. The piezoelectric signal from the deformed suspension is detected to control the amplitude of oscillation at constant magnitude. We also employed this chopper in an optical sensor as a mechanical component to regulate the incident laser-beam, and demonstrated chopper-amplification and demodulation.

Original languageEnglish
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems
Place of PublicationPiscataway, NJ, United States
PublisherPubl by IEEE
Pages325-330
Number of pages6
ISBN (Print)078031834X
Publication statusPublished - 1994
Externally publishedYes
EventProceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn
Duration: 1994 Jan 251994 Jan 28

Other

OtherProceedings of the IEEE Micro Electro Mechanical Systems
CityOiso, Jpn
Period94/1/2594/1/28

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Engineering(all)

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  • Cite this

    Toshiyoshi, H., Fujita, H., & Ueda, T. (1994). Self-excited chopper made by quartz micromachining and its application to an optical sensor. In Proceedings of the IEEE Micro Electro Mechanical Systems (pp. 325-330). Publ by IEEE.