Sensitivity enhancement by micro helmholtz resonator for ultrasonic distance sensor

A. Suzuki, H. Takahashi, Eiji Iwase, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports on a micro Helmholtz resonator (HR) enhancing the sensitivity of an ultrasonic distance sensor. Attaching an HR to the sensor that consists of a piezoresistive cantilever microphone makes its sensitivity against ultrasonic wave higher. A HR of 600 μm height demonstrated a 17.5 times larger maximum amplitude of the cantilever vibration against single frequency wave. We also evaluated the dependence of the sensitivity on frequency and acoustic pressure. Our sensor was able to detect the distance of 0.5-6.0 m with the maximum error of 2.0%.

Original languageEnglish
Title of host publicationTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages1557-1560
Number of pages4
DOIs
Publication statusPublished - 2009
Externally publishedYes
EventTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO
Duration: 2009 Jun 212009 Jun 25

Other

OtherTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
CityDenver, CO
Period09/6/2109/6/25

Fingerprint

Resonators
Ultrasonics
Sensors
Ultrasonic waves
Microphones
Acoustics

Keywords

  • Distance sensor
  • Helmholtz resonator
  • Piezoresistive cantilever

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Suzuki, A., Takahashi, H., Iwase, E., Matsumoto, K., & Shimoyama, I. (2009). Sensitivity enhancement by micro helmholtz resonator for ultrasonic distance sensor. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1557-1560). [5285784] https://doi.org/10.1109/SENSOR.2009.5285784

Sensitivity enhancement by micro helmholtz resonator for ultrasonic distance sensor. / Suzuki, A.; Takahashi, H.; Iwase, Eiji; Matsumoto, K.; Shimoyama, I.

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 1557-1560 5285784.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Suzuki, A, Takahashi, H, Iwase, E, Matsumoto, K & Shimoyama, I 2009, Sensitivity enhancement by micro helmholtz resonator for ultrasonic distance sensor. in TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems., 5285784, pp. 1557-1560, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, 09/6/21. https://doi.org/10.1109/SENSOR.2009.5285784
Suzuki A, Takahashi H, Iwase E, Matsumoto K, Shimoyama I. Sensitivity enhancement by micro helmholtz resonator for ultrasonic distance sensor. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 1557-1560. 5285784 https://doi.org/10.1109/SENSOR.2009.5285784
Suzuki, A. ; Takahashi, H. ; Iwase, Eiji ; Matsumoto, K. ; Shimoyama, I. / Sensitivity enhancement by micro helmholtz resonator for ultrasonic distance sensor. TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. pp. 1557-1560
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