Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification

Siim Heinsalu, Anna Kawano, Yuji Isogai, Yuichi Matsushima, Hiroshi Ishikawa, Katsuyuki Utaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Two methods for refractive index sensitivity improvement of silicon SW-MS BG refractive index sensors were considered. Height parameter was optimized and suspended waveguides were introduced. Experimentally obtained values were 850 nm/RIU and 1100 nm/RIU, respectively.

Original languageEnglish
Title of host publication2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781943580866
Publication statusPublished - 2021 Jun
Event2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - San Francisco, United States
Duration: 2021 Jun 62021 Jun 11

Publication series

Name2021 Optical Fiber Communications Conference and Exhibition, OFC 2021 - Proceedings

Conference

Conference2021 Optical Fiber Communications Conference and Exhibition, OFC 2021
Country/TerritoryUnited States
CitySan Francisco
Period21/6/621/6/11

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Networks and Communications
  • Hardware and Architecture
  • Signal Processing
  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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