Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification

Siim Heinsalu*, Anna Kawano, Yuji Isogai, Yuichi Matsushima, Hiroshi Ishikawa, Katsuyuki Utaka

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Two methods for refractive index sensitivity improvement of silicon SW-MS BG refractive index sensors were considered. Height parameter was optimized and suspended waveguides were introduced. Experimentally obtained values were 850 nm/RIU and 1100 nm/RIU, respectively.

Original languageEnglish
Title of host publicationOptical Fiber Communication Conference, OFC 2021
PublisherOptica Publishing Group (formerly OSA)
ISBN (Electronic)9781557528209
Publication statusPublished - 2021
EventOptical Fiber Communication Conference, OFC 2021 - Virtual, Online, United States
Duration: 2021 Jun 62021 Jun 11

Publication series

NameOptics InfoBase Conference Papers

Conference

ConferenceOptical Fiber Communication Conference, OFC 2021
Country/TerritoryUnited States
CityVirtual, Online
Period21/6/621/6/11

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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