Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification

Siim Heinsalu, Anna Kawano, Yuji Isogai, Yuichi Matsushima, Hiroshi Ishikawa, Katsuyuki Utaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds