Sequential batch assembly of 3-D microstructures with elastic hinges by a magnetic field

Eiji Iwase, Shoji Takeuchi, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

This paper describes three-dimensional (3-D) microstructure assembly using an external magnetic field. An external magnetic field perpendicular to a substrate lifts up a hinged structure due to the shape magnetic anisotropy. Micro flap structures (4.5 μm-thick electroplated Permalloy) having 0.2 μm-thick nickel elastic hinges with various lengths and widths are bent in out-of-plane direction in a magnetic field up to 50 kA/m. The volume of magnetic material and the stiffness of the hinges determine the sensitivity to a magnetic field. As a result, we realized sequential batch assembly using the difference of the sensitivity. By way of the example, we have erected plates 600 μm × 600 μm in size. Also, structures bent at 90 and 45 degrees out of the plane have been obtained at the same time.

Original languageEnglish
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Pages188-191
Number of pages4
Publication statusPublished - 2002
Externally publishedYes
Event15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV
Duration: 2002 Jan 202002 Jan 24

Other

Other15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002
CityLas Vegas, NV
Period02/1/2002/1/24

Fingerprint

Hinges
Magnetic fields
Microstructure
Magnetic anisotropy
Magnetic materials
Nickel
Stiffness
Substrates

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Iwase, E., Takeuchi, S., & Shimoyama, I. (2002). Sequential batch assembly of 3-D microstructures with elastic hinges by a magnetic field. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 188-191)

Sequential batch assembly of 3-D microstructures with elastic hinges by a magnetic field. / Iwase, Eiji; Takeuchi, Shoji; Shimoyama, Isao.

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2002. p. 188-191.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Iwase, E, Takeuchi, S & Shimoyama, I 2002, Sequential batch assembly of 3-D microstructures with elastic hinges by a magnetic field. in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). pp. 188-191, 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002, Las Vegas, NV, 02/1/20.
Iwase E, Takeuchi S, Shimoyama I. Sequential batch assembly of 3-D microstructures with elastic hinges by a magnetic field. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2002. p. 188-191
Iwase, Eiji ; Takeuchi, Shoji ; Shimoyama, Isao. / Sequential batch assembly of 3-D microstructures with elastic hinges by a magnetic field. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2002. pp. 188-191
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