Shear mode electromechanical coupling coefficient k15 and crystallites alignment of (11 2- 0) textured ZnO films

Takahiko Yanagitani, Masato Kiuchi, Mami Matsukawa, Yoshiaki Watanabe

Research output: Contribution to journalArticle

41 Citations (Scopus)

Abstract

ZnO film, in which the crystallite c axis lies in the substrate plane [(11 2- 0) textured ZnO], is a good candidate for application in shear mode piezoelectric devices. The relationships between the degree of crystallites alignment and the shear mode electromechanical coupling coefficient k15 in (11 2- 0) textured ZnO films have been investigated. Forty pure-shear mode high overtone bulk acoustic resonators consisting of the (11 2- 0) textured ZnO film were prepared. The film was varied in crystallites alignment and film thickness. The degrees of crystallites alignment of the films were determined by x-ray pole figure analysis. The k15 values of the films were estimated from the conversion loss characteristics of the resonators. A significant correlation was observed between dispersion of the x-ray poles and the k15 values. However, the k15 values in the thinner films were clearly reduced as compared with those in the thicker films despite their similarities in crystallites alignment. In addition, unexpected second harmonic mode resonance was detected in the thinner films. We concluded that the piezoelectrically inactive layer in the initial film growth deteriorated the k15 value in thinner films.

Original languageEnglish
Article number024110
JournalJournal of Applied Physics
Volume102
Issue number2
DOIs
Publication statusPublished - 2007
Externally publishedYes

Fingerprint

coupling coefficients
crystallites
alignment
shear
poles
thin films
resonators
harmonics
thick films
x rays
film thickness
acoustics

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

Shear mode electromechanical coupling coefficient k15 and crystallites alignment of (11 2- 0) textured ZnO films. / Yanagitani, Takahiko; Kiuchi, Masato; Matsukawa, Mami; Watanabe, Yoshiaki.

In: Journal of Applied Physics, Vol. 102, No. 2, 024110, 2007.

Research output: Contribution to journalArticle

@article{a5e7b19995e64102847735db13198a3c,
title = "Shear mode electromechanical coupling coefficient k15 and crystallites alignment of (11 2- 0) textured ZnO films",
abstract = "ZnO film, in which the crystallite c axis lies in the substrate plane [(11 2- 0) textured ZnO], is a good candidate for application in shear mode piezoelectric devices. The relationships between the degree of crystallites alignment and the shear mode electromechanical coupling coefficient k15 in (11 2- 0) textured ZnO films have been investigated. Forty pure-shear mode high overtone bulk acoustic resonators consisting of the (11 2- 0) textured ZnO film were prepared. The film was varied in crystallites alignment and film thickness. The degrees of crystallites alignment of the films were determined by x-ray pole figure analysis. The k15 values of the films were estimated from the conversion loss characteristics of the resonators. A significant correlation was observed between dispersion of the x-ray poles and the k15 values. However, the k15 values in the thinner films were clearly reduced as compared with those in the thicker films despite their similarities in crystallites alignment. In addition, unexpected second harmonic mode resonance was detected in the thinner films. We concluded that the piezoelectrically inactive layer in the initial film growth deteriorated the k15 value in thinner films.",
author = "Takahiko Yanagitani and Masato Kiuchi and Mami Matsukawa and Yoshiaki Watanabe",
year = "2007",
doi = "10.1063/1.2752133",
language = "English",
volume = "102",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "2",

}

TY - JOUR

T1 - Shear mode electromechanical coupling coefficient k15 and crystallites alignment of (11 2- 0) textured ZnO films

AU - Yanagitani, Takahiko

AU - Kiuchi, Masato

AU - Matsukawa, Mami

AU - Watanabe, Yoshiaki

PY - 2007

Y1 - 2007

N2 - ZnO film, in which the crystallite c axis lies in the substrate plane [(11 2- 0) textured ZnO], is a good candidate for application in shear mode piezoelectric devices. The relationships between the degree of crystallites alignment and the shear mode electromechanical coupling coefficient k15 in (11 2- 0) textured ZnO films have been investigated. Forty pure-shear mode high overtone bulk acoustic resonators consisting of the (11 2- 0) textured ZnO film were prepared. The film was varied in crystallites alignment and film thickness. The degrees of crystallites alignment of the films were determined by x-ray pole figure analysis. The k15 values of the films were estimated from the conversion loss characteristics of the resonators. A significant correlation was observed between dispersion of the x-ray poles and the k15 values. However, the k15 values in the thinner films were clearly reduced as compared with those in the thicker films despite their similarities in crystallites alignment. In addition, unexpected second harmonic mode resonance was detected in the thinner films. We concluded that the piezoelectrically inactive layer in the initial film growth deteriorated the k15 value in thinner films.

AB - ZnO film, in which the crystallite c axis lies in the substrate plane [(11 2- 0) textured ZnO], is a good candidate for application in shear mode piezoelectric devices. The relationships between the degree of crystallites alignment and the shear mode electromechanical coupling coefficient k15 in (11 2- 0) textured ZnO films have been investigated. Forty pure-shear mode high overtone bulk acoustic resonators consisting of the (11 2- 0) textured ZnO film were prepared. The film was varied in crystallites alignment and film thickness. The degrees of crystallites alignment of the films were determined by x-ray pole figure analysis. The k15 values of the films were estimated from the conversion loss characteristics of the resonators. A significant correlation was observed between dispersion of the x-ray poles and the k15 values. However, the k15 values in the thinner films were clearly reduced as compared with those in the thicker films despite their similarities in crystallites alignment. In addition, unexpected second harmonic mode resonance was detected in the thinner films. We concluded that the piezoelectrically inactive layer in the initial film growth deteriorated the k15 value in thinner films.

UR - http://www.scopus.com/inward/record.url?scp=34547589151&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34547589151&partnerID=8YFLogxK

U2 - 10.1063/1.2752133

DO - 10.1063/1.2752133

M3 - Article

AN - SCOPUS:34547589151

VL - 102

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 2

M1 - 024110

ER -