Shear Mode Polarity Inverted ScAIN Multilayer for Application to Transformer in Rectifying Antenna

Rei Karasawa, Takahiko Yanagitani

    Research output: Contribution to journalConference article

    Abstract

    Increasing demand for wireless sensors has generated considerable recent research interest aiming at harvesting energy from surrounding electromagnetic wave. Low RF-to-DC conversion efficiency in the rectenna due to a weak RF input signal is a largely unsolved problem. Here we introduce the piezoelectrically induced shear stress inverted FBAR transformer, which combines the features of FBAR and piezoelectric transformer, to overcome this problem. In this paper, we applied the techniques of glancing angle sputtering deposition to grow a 12-layer c-axis zig-zag ScAIN film. c-Axis zig-zag structure was clearly observed by scanning electron microscopy. c-Axis tilt angles of the layers were determined to be 51-53 degrees by XRD analysis. The 12-layer ScAIN film HBAR excites 12th-order shear mode at 2.45 GHz. This new type of material has potential for use as a GHz voltage transformer in the rectenna.

    Original languageEnglish
    Article number8580083
    JournalIEEE International Ultrasonics Symposium, IUS
    Volume2018-January
    DOIs
    Publication statusPublished - 2018 Jan 1
    Event2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan
    Duration: 2018 Oct 222018 Oct 25

    Keywords

    • c-axis tilted ScAIN films
    • rectenna
    • shear wave

    ASJC Scopus subject areas

    • Acoustics and Ultrasonics

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