TY - JOUR
T1 - Shear Mode Polarity Inverted ScAIN Multilayer for Application to Transformer in Rectifying Antenna
AU - Karasawa, Rei
AU - Yanagitani, Takahiko
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018
Y1 - 2018
N2 - Increasing demand for wireless sensors has generated considerable recent research interest aiming at harvesting energy from surrounding electromagnetic wave. Low RF-to-DC conversion efficiency in the rectenna due to a weak RF input signal is a largely unsolved problem. Here we introduce the piezoelectrically induced shear stress inverted FBAR transformer, which combines the features of FBAR and piezoelectric transformer, to overcome this problem. In this paper, we applied the techniques of glancing angle sputtering deposition to grow a 12-layer c-axis zig-zag ScAIN film. c-Axis zig-zag structure was clearly observed by scanning electron microscopy. c-Axis tilt angles of the layers were determined to be 51-53 degrees by XRD analysis. The 12-layer ScAIN film HBAR excites 12th-order shear mode at 2.45 GHz. This new type of material has potential for use as a GHz voltage transformer in the rectenna.
AB - Increasing demand for wireless sensors has generated considerable recent research interest aiming at harvesting energy from surrounding electromagnetic wave. Low RF-to-DC conversion efficiency in the rectenna due to a weak RF input signal is a largely unsolved problem. Here we introduce the piezoelectrically induced shear stress inverted FBAR transformer, which combines the features of FBAR and piezoelectric transformer, to overcome this problem. In this paper, we applied the techniques of glancing angle sputtering deposition to grow a 12-layer c-axis zig-zag ScAIN film. c-Axis zig-zag structure was clearly observed by scanning electron microscopy. c-Axis tilt angles of the layers were determined to be 51-53 degrees by XRD analysis. The 12-layer ScAIN film HBAR excites 12th-order shear mode at 2.45 GHz. This new type of material has potential for use as a GHz voltage transformer in the rectenna.
KW - c-axis tilted ScAIN films
KW - rectenna
KW - shear wave
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U2 - 10.1109/ULTSYM.2018.8580083
DO - 10.1109/ULTSYM.2018.8580083
M3 - Conference article
AN - SCOPUS:85062544403
SN - 1948-5719
VL - 2018-January
JO - IEEE International Ultrasonics Symposium, IUS
JF - IEEE International Ultrasonics Symposium, IUS
M1 - 8580083
T2 - 2018 IEEE International Ultrasonics Symposium, IUS 2018
Y2 - 22 October 2018 through 25 October 2018
ER -