Silica-based monolithic sensing plates for waveguide-mode sensors

Makoto Fujimaki*, Carsten Rockstuhl, Xiaomin Wang, Koichi Awazu, Junji Tominaga, Yuuki Koganezawa, Yoshimichi Ohki, Tetsuro Komatsubara

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

53 Citations (Scopus)


We developed a monolithic sensing plate for a waveguide-mode sensor. The plate consists of a SiO2glass substrate and a thin silicon layer the surface of which is thermally oxidized to form a SiO2glass waveguide. We confirmed that the sensing plate is suitable for high-sensitivity detection of molecular adsorption at the waveguide surface. In addition, a significant enhancement of the sensitivity of the sensor was achieved by perforating the waveguide with holes with diameters of a few tens of nanometers by selective etching of latent tracks created by swift heavy-ion irradiation. Possible strategies for optimizing the plate are discussed.

Original languageEnglish
Pages (from-to)6408-6416
Number of pages9
JournalOptics Express
Issue number9
Publication statusPublished - 2008 Apr 28

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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