Silica-based monolithic sensing plates for waveguide-mode sensors

Makoto Fujimaki; Carsten Rockstuhl; Xiaomin Wang; Koichi Awazu; Junji Tominaga; Yuuki Koganezawa; Yoshimichi Ohki; Tetsuro Komatsubara

doi:10.1364/OE.16.006408

Silica-based monolithic sensing plates for waveguide-mode sensors

Makoto Fujimaki, Carsten Rockstuhl, Xiaomin Wang, Koichi Awazu, Junji Tominaga, Yuuki Koganezawa, Yoshimichi Ohki, Tetsuro Komatsubara

Kagami Memorial Research Institute for Materials Science and Technology

Research output: Contribution to journal › Article › peer-review

51 Citations (Scopus)

Abstract

We developed a monolithic sensing plate for a waveguide-mode sensor. The plate consists of a SiO₂glass substrate and a thin silicon layer the surface of which is thermally oxidized to form a SiO₂glass waveguide. We confirmed that the sensing plate is suitable for high-sensitivity detection of molecular adsorption at the waveguide surface. In addition, a significant enhancement of the sensitivity of the sensor was achieved by perforating the waveguide with holes with diameters of a few tens of nanometers by selective etching of latent tracks created by swift heavy-ion irradiation. Possible strategies for optimizing the plate are discussed.

Original language	English
Pages (from-to)	6408-6416
Number of pages	9
Journal	Optics Express
Volume	16
Issue number	9
DOIs	https://doi.org/10.1364/OE.16.006408
Publication status	Published - 2008 Apr 28

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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abstract = "We developed a monolithic sensing plate for a waveguide-mode sensor. The plate consists of a SiO2glass substrate and a thin silicon layer the surface of which is thermally oxidized to form a SiO2glass waveguide. We confirmed that the sensing plate is suitable for high-sensitivity detection of molecular adsorption at the waveguide surface. In addition, a significant enhancement of the sensitivity of the sensor was achieved by perforating the waveguide with holes with diameters of a few tens of nanometers by selective etching of latent tracks created by swift heavy-ion irradiation. Possible strategies for optimizing the plate are discussed.",

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AU - Fujimaki, Makoto

AU - Rockstuhl, Carsten

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AU - Awazu, Koichi

AU - Tominaga, Junji

AU - Koganezawa, Yuuki

AU - Ohki, Yoshimichi

AU - Komatsubara, Tetsuro

PY - 2008/4/28

Y1 - 2008/4/28

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AB - We developed a monolithic sensing plate for a waveguide-mode sensor. The plate consists of a SiO2glass substrate and a thin silicon layer the surface of which is thermally oxidized to form a SiO2glass waveguide. We confirmed that the sensing plate is suitable for high-sensitivity detection of molecular adsorption at the waveguide surface. In addition, a significant enhancement of the sensitivity of the sensor was achieved by perforating the waveguide with holes with diameters of a few tens of nanometers by selective etching of latent tracks created by swift heavy-ion irradiation. Possible strategies for optimizing the plate are discussed.

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Silica-based monolithic sensing plates for waveguide-mode sensors

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