Abstract
We developed a monolithic sensing plate for a waveguide-mode sensor. The plate consists of a SiO2 glass substrate and a thin silicon layer the surface of which is thermally oxidized to form a SiO2 glass waveguide. We confirmed that the sensing plate is suitable for high-sensitivity detection of molecular adsorption at the waveguide surface. In addition, a significant enhancement of the sensitivity of the sensor was achieved by perforating the waveguide with holes with diameters of a few tens of nanometers by selective etching of latent tracks created by swift heavy-ion irradiation. Possible strategies for optimizing the plate are discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 6408-6416 |
| Number of pages | 9 |
| Journal | Optics Express |
| Volume | 16 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - 2008 Apr 28 |
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ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
Cite this
Silica-based monolithic sensing plates for waveguide-mode sensors. / Fujimaki, Makoto; Rockstuhl, Carsten; Wang, Xiaomin; Awazu, Koichi; Tominaga, Junji; Koganezawa, Yuuki; Ohki, Yoshimichi; Komatsubara, Tetsuro.
In: Optics Express, Vol. 16, No. 9, 28.04.2008, p. 6408-6416.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Silica-based monolithic sensing plates for waveguide-mode sensors
AU - Fujimaki, Makoto
AU - Rockstuhl, Carsten
AU - Wang, Xiaomin
AU - Awazu, Koichi
AU - Tominaga, Junji
AU - Koganezawa, Yuuki
AU - Ohki, Yoshimichi
AU - Komatsubara, Tetsuro
PY - 2008/4/28
Y1 - 2008/4/28
N2 - We developed a monolithic sensing plate for a waveguide-mode sensor. The plate consists of a SiO2 glass substrate and a thin silicon layer the surface of which is thermally oxidized to form a SiO2 glass waveguide. We confirmed that the sensing plate is suitable for high-sensitivity detection of molecular adsorption at the waveguide surface. In addition, a significant enhancement of the sensitivity of the sensor was achieved by perforating the waveguide with holes with diameters of a few tens of nanometers by selective etching of latent tracks created by swift heavy-ion irradiation. Possible strategies for optimizing the plate are discussed.
AB - We developed a monolithic sensing plate for a waveguide-mode sensor. The plate consists of a SiO2 glass substrate and a thin silicon layer the surface of which is thermally oxidized to form a SiO2 glass waveguide. We confirmed that the sensing plate is suitable for high-sensitivity detection of molecular adsorption at the waveguide surface. In addition, a significant enhancement of the sensitivity of the sensor was achieved by perforating the waveguide with holes with diameters of a few tens of nanometers by selective etching of latent tracks created by swift heavy-ion irradiation. Possible strategies for optimizing the plate are discussed.
UR - http://www.scopus.com/inward/record.url?scp=43049129283&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=43049129283&partnerID=8YFLogxK
U2 - 10.1364/OE.16.006408
DO - 10.1364/OE.16.006408
M3 - Article
C2 - 18545344
AN - SCOPUS:43049129283
VL - 16
SP - 6408
EP - 6416
JO - Optics Express
JF - Optics Express
SN - 1094-4087
IS - 9
ER -