Silica-based monolithic sensing plates for waveguide-mode sensors

Makoto Fujimaki, Carsten Rockstuhl, Xiaomin Wang, Koichi Awazu, Junji Tominaga, Yuuki Koganezawa, Yoshimichi Ohki, Tetsuro Komatsubara

    Research output: Contribution to journalArticle

    49 Citations (Scopus)

    Abstract

    We developed a monolithic sensing plate for a waveguide-mode sensor. The plate consists of a SiO2 glass substrate and a thin silicon layer the surface of which is thermally oxidized to form a SiO2 glass waveguide. We confirmed that the sensing plate is suitable for high-sensitivity detection of molecular adsorption at the waveguide surface. In addition, a significant enhancement of the sensitivity of the sensor was achieved by perforating the waveguide with holes with diameters of a few tens of nanometers by selective etching of latent tracks created by swift heavy-ion irradiation. Possible strategies for optimizing the plate are discussed.

    Original languageEnglish
    Pages (from-to)6408-6416
    Number of pages9
    JournalOptics Express
    Volume16
    Issue number9
    DOIs
    Publication statusPublished - 2008 Apr 28

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    silicon dioxide
    waveguides
    sensors
    perforating
    glass
    sensitivity
    ion irradiation
    heavy ions
    etching
    adsorption
    augmentation
    silicon

    ASJC Scopus subject areas

    • Atomic and Molecular Physics, and Optics

    Cite this

    Fujimaki, M., Rockstuhl, C., Wang, X., Awazu, K., Tominaga, J., Koganezawa, Y., ... Komatsubara, T. (2008). Silica-based monolithic sensing plates for waveguide-mode sensors. Optics Express, 16(9), 6408-6416. https://doi.org/10.1364/OE.16.006408

    Silica-based monolithic sensing plates for waveguide-mode sensors. / Fujimaki, Makoto; Rockstuhl, Carsten; Wang, Xiaomin; Awazu, Koichi; Tominaga, Junji; Koganezawa, Yuuki; Ohki, Yoshimichi; Komatsubara, Tetsuro.

    In: Optics Express, Vol. 16, No. 9, 28.04.2008, p. 6408-6416.

    Research output: Contribution to journalArticle

    Fujimaki, M, Rockstuhl, C, Wang, X, Awazu, K, Tominaga, J, Koganezawa, Y, Ohki, Y & Komatsubara, T 2008, 'Silica-based monolithic sensing plates for waveguide-mode sensors', Optics Express, vol. 16, no. 9, pp. 6408-6416. https://doi.org/10.1364/OE.16.006408
    Fujimaki M, Rockstuhl C, Wang X, Awazu K, Tominaga J, Koganezawa Y et al. Silica-based monolithic sensing plates for waveguide-mode sensors. Optics Express. 2008 Apr 28;16(9):6408-6416. https://doi.org/10.1364/OE.16.006408
    Fujimaki, Makoto ; Rockstuhl, Carsten ; Wang, Xiaomin ; Awazu, Koichi ; Tominaga, Junji ; Koganezawa, Yuuki ; Ohki, Yoshimichi ; Komatsubara, Tetsuro. / Silica-based monolithic sensing plates for waveguide-mode sensors. In: Optics Express. 2008 ; Vol. 16, No. 9. pp. 6408-6416.
    @article{e0557f00fffe4940be7938fdb6d0473f,
    title = "Silica-based monolithic sensing plates for waveguide-mode sensors",
    abstract = "We developed a monolithic sensing plate for a waveguide-mode sensor. The plate consists of a SiO2 glass substrate and a thin silicon layer the surface of which is thermally oxidized to form a SiO2 glass waveguide. We confirmed that the sensing plate is suitable for high-sensitivity detection of molecular adsorption at the waveguide surface. In addition, a significant enhancement of the sensitivity of the sensor was achieved by perforating the waveguide with holes with diameters of a few tens of nanometers by selective etching of latent tracks created by swift heavy-ion irradiation. Possible strategies for optimizing the plate are discussed.",
    author = "Makoto Fujimaki and Carsten Rockstuhl and Xiaomin Wang and Koichi Awazu and Junji Tominaga and Yuuki Koganezawa and Yoshimichi Ohki and Tetsuro Komatsubara",
    year = "2008",
    month = "4",
    day = "28",
    doi = "10.1364/OE.16.006408",
    language = "English",
    volume = "16",
    pages = "6408--6416",
    journal = "Optics Express",
    issn = "1094-4087",
    publisher = "The Optical Society",
    number = "9",

    }

    TY - JOUR

    T1 - Silica-based monolithic sensing plates for waveguide-mode sensors

    AU - Fujimaki, Makoto

    AU - Rockstuhl, Carsten

    AU - Wang, Xiaomin

    AU - Awazu, Koichi

    AU - Tominaga, Junji

    AU - Koganezawa, Yuuki

    AU - Ohki, Yoshimichi

    AU - Komatsubara, Tetsuro

    PY - 2008/4/28

    Y1 - 2008/4/28

    N2 - We developed a monolithic sensing plate for a waveguide-mode sensor. The plate consists of a SiO2 glass substrate and a thin silicon layer the surface of which is thermally oxidized to form a SiO2 glass waveguide. We confirmed that the sensing plate is suitable for high-sensitivity detection of molecular adsorption at the waveguide surface. In addition, a significant enhancement of the sensitivity of the sensor was achieved by perforating the waveguide with holes with diameters of a few tens of nanometers by selective etching of latent tracks created by swift heavy-ion irradiation. Possible strategies for optimizing the plate are discussed.

    AB - We developed a monolithic sensing plate for a waveguide-mode sensor. The plate consists of a SiO2 glass substrate and a thin silicon layer the surface of which is thermally oxidized to form a SiO2 glass waveguide. We confirmed that the sensing plate is suitable for high-sensitivity detection of molecular adsorption at the waveguide surface. In addition, a significant enhancement of the sensitivity of the sensor was achieved by perforating the waveguide with holes with diameters of a few tens of nanometers by selective etching of latent tracks created by swift heavy-ion irradiation. Possible strategies for optimizing the plate are discussed.

    UR - http://www.scopus.com/inward/record.url?scp=43049129283&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=43049129283&partnerID=8YFLogxK

    U2 - 10.1364/OE.16.006408

    DO - 10.1364/OE.16.006408

    M3 - Article

    C2 - 18545344

    AN - SCOPUS:43049129283

    VL - 16

    SP - 6408

    EP - 6416

    JO - Optics Express

    JF - Optics Express

    SN - 1094-4087

    IS - 9

    ER -